3D resist modeling for OPC correction and verification

Zhu, Liang; Ren, Qinyuan; Tan, Neo; Ai, Zhibo

doi:10.1109/asicon.2015.7517066

2015 IEEE 11th International Conference on ASIC (ASICON) 2015

DOI: 10.1109/asicon.2015.7517066

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3D resist modeling for OPC correction and verification

Liang Zhu¹,

Qinyuan Ren

Neo Tan³

et al.

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3D resist modeling for OPC correction and verification

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