3D modeling of electrostatic interaction between atomic force microscopy probe and dielectric surface: Impact of tip shape and cantilever contribution

Boularas, A.; Baudoin, F.; Teyssèdre, G.; Villeneuve-Faure, Christina; Clain, Stéphane

doi:10.1109/tdei.2016.005341

Cited by 14 publications

(14 citation statements)

References 27 publications

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“…According to the Equivalent Charge Method (ECM), Arinero investigated the nanoparticles filled into dielectric film composites by finite-element simulations, and demonstrated that the electrostatic force detected by a conductive probe can be quantitatively analyzed by ECM independent of film thickness, tip radius and tip-sample distance [21][22][23]. Boularas proved by the finite-element simulations of electrostatic force between AFM tip and dielectric surface that the tip geometry has a great influence on the electrostatic force detection [24]. By analyzing the truncated cone and cantilever of a microscopic probe in detecting the electrostatic interaction between the probe tip and a thick insulating substrate, Gramse presented an effective model for describing the electrostatic contribution from the cantilever [25].…”

Section: Introductionmentioning

confidence: 99%

Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations

Sun

2019

Sensors

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Finite element simulations for detecting the dielectric permittivity of planar nanoscale dielectrics by electrostatic probe are performed to explore the microprobe technology of characterizing nanomaterials. The electrostatic force produced by the polarization of nanoscale dielectrics is analyzed by a capacitance gradient between the probe and nano-sample in an electrostatic detection system, in which sample thickness is varied in the range of 1 nm–10 μm, the width (diameter) encompasses from 100 nm to 10 μm, the tilt angle of probe alters between 0° and 20°, and the relative dielectric constant covers 2–1000 to represent a majority of dielectric materials. For dielectric thin films with infinite lateral dimension, the critical diameter is determined, not only by the geometric shape and tilt angle of detecting probe, but also by the thickness of the tested nanofilm. Meanwhile, for the thickness greater than 100 nm, the critical diameter is almost independent on the probe geometry while being primarily dominated by the thickness and dielectric permittivity of nanomaterials, which approximately complies a variation as exponential functions. For nanofilms with a plane size which can be regarded as infinite, a pertaining analytical formalism is established and verified for the film thickness in an ultrathin limit of 10–100 nm, with the probe axis being perpendicular and tilt to film plane, respectively. The present research suggests a general testing scheme for characterizing flat, nanoscale, dielectric materials on metal substrates by means of electrostatic microscopy, which can realize an accurate quantitative analysis of dielectric permittivity.

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Section: Introductionmentioning

confidence: 99%

Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations

Sun

2019

Sensors

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“…Results provided by this approach present a good agreement with experimental ones for short tip-sample distances; -Finite element model (FEM) reproducing the AFM tip in 2D axisymmetrical geometry [47][48]. This model is typically used for interpretation of KPFM measurements; -3D FEM reproducing the real pyramidal AFM-tip shape [49]. This approach proposed recently, exhibits a good agreement with experimental results also for large tip-sample distances but requires longer computational times.…”

Section: Electrostatic Force Modellingmentioning

confidence: 58%

Space Charge at Nanoscale: Probing Injection and Dynamic Phenomena Under Dark/Light Configurations by Using KPFM and C-AFM

Villeneuve-Faure

Boudou

Teyssèdre

2019

Electrical Atomic Force Microscopy for Nanoelectronics

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“…The geometry of the system (Figure 1) consists of a stationary tip positioned over an infinite dielectric layer (silicon nitride, SiNx) with a thickness of 500 nm and a relative permittivity =7.5. The tip has a tetrahedral shape ending with an apex (a half-sphere of radius R of 25 nm) [5].…”

Section: A Geometry Descriptionmentioning

confidence: 99%

“…Associated with the electrostatic characterization of surfaces, most of the theoretical studies on electrical modes derived from AFM have been focused on the quantitative estimation of the electrostatic force between an AFM probe and a sample. These studies are based on 3D or 2D analytical models [3,4] or Finite Element Model (FEM) [5][6]. The main issue for modelling the electrostatic interactions in AFM is its complexity with notably multiscale objects.…”

Section: Introductionmentioning

confidence: 99%

“…In general, the sample is assumed flat, the cantilever is not taken into account or approximated by simple disk, and some geometric entities are assumed as representative of the AFM "tip": a simple charge [7], a sphere [8,9] or a cone [10], are the most used shapes. In some cases more sophisticated "tips" are proposed such as a spherical cap connected to a tip cone [4] or rectangular cap connected to a tetrahedron [5]. The latter is the closest to the real tip and the simulation results have been compared to the experimental results.…”

Section: Introductionmentioning

confidence: 99%

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Sensitivity analysis of the electrostatic interaction between the atomic force microscopy probe and a thin dielectric film with 3D-localized charge cloud

Azib

Baudoin

Binaud

et al. 2019

Journal of Applied Physics

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Recent experimental studies have demonstrated that Electrostatic Force Distance Curve (EFDC) can be used for space charge probing in thin dielectric layers. Experiments highlight that this method seems to be sensitive to charge localization. However, the relative contributions of charge distribution parameters (density, lateral/in-depth spreading) remain unknown. The aim of this paper is to determine the contribution of each charge distribution parameters to EFDC. To reach this aim, we have developed an electrostatic and an electromechanical model to simulate EFDC over a charge cloud trapped in a thin dielectric layer. Hence, the EFDC sensitivity to charge localization could be investigated through the shape parameters of the charge cloud and by extracting the respective contributions from the Atomic Force Microscopy (AFM) tip and the cantilever.

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3D modeling of electrostatic interaction between atomic force microscopy probe and dielectric surface: Impact of tip shape and cantilever contribution

Cited by 14 publications

References 27 publications

Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations

Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations

Space Charge at Nanoscale: Probing Injection and Dynamic Phenomena Under Dark/Light Configurations by Using KPFM and C-AFM

Sensitivity analysis of the electrostatic interaction between the atomic force microscopy probe and a thin dielectric film with 3D-localized charge cloud

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