3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance

Abstract

Due to their high‐power density and long lifetime, microsupercapacitors have been considered as an efficient energy supply/storage solution for the operation of small electronic devices. However, their fabrication remains confined to 2D thin‐film microdevices with limited areal energy. In this study, the integration of all‐solid‐state 3D interdigitated microsupercapacitors on 4 in. silicon wafers with record energy density is demonstrated. The device electrodes are composed of a pseudocapacitive hydrated ruthenium dioxide RuO2 deposited onto highly porous current collectors. The encapsulated devices exhibit cell capacitance of 812 mF cm−2 per footprint area at an energy density of 329 mJ cm−2, which is the highest value ever reported for planar configuration. These components achieve one of the highest surface energy/power density trade‐offs and address the issue of electrical energy storage of modern electronics.

High Areal Capacity Porous Sn-Au Alloys with Long Cycle Life for Li-ion Microbatteries

“…1). We have previously reported the successful formation of such highly porous gold films by constant potential mode 28,29 . However, for commercial upscaling, galvanostatic deposition is preferred and hence, in the present work, an optimized protocol with constant current deposition was utilized.…”

On chip MnO2-based 3D micro-supercapacitors with ultra-high areal energy density

“…The footprint surface of the MSC is about several tens of millimeter square. Taking into account the limited surface, the performance of the 3D MSC could be increased by one to three orders of magnitude as compared to the planar technology [7,8,[24][25][26].…”

“…They allow to maximize the surface contact between the electrode material and the electrolyte thanks to the increase of the area enhancement factor (AEF) of a 3D scaffold. Indeed, thin film deposition on high AEF 3D scaffolds increases the mass loading of active material, thus allowing to reach remarkable areal capacitance values [7,8,[24][25][26].…”

Stretchable Supercapacitors as Emergent Energy Storage Units for Health Monitoring Bioelectronics

“…[48] In another study, a new polyelectrolyte comprised of PAM-VSNPs was developed to fabricate wavy-pattern supercapacitor, resulting in a superstretchability of 1000% with 2.6fold capacitance enhancement and compressibility of −50% with good retention of the initial performance. To address this problem, in-plane interdigitated supercapacitors [134,135] have been introduced ( Figure 4bii). [35] As another instance, a hybrid nanomembrane supercapacitor was developed based on prestretched Ecoflex film, [133] as shown in Figure 6a.…”

“…Although stretchable supercapacitor with sandwich structure is easy to fabricate, it often imposes difficulties for system miniaturization. To address this problem, in‐plane interdigitated supercapacitors have been introduced (Figure bii). The interdigitated design provides a short distance for ion transport and a miniaturized size for packaging, which is favorable for developing small‐sized energy storage systems.…”