3D Integrated Laser Attach Technology on a 300-mm Monolithic CMOS Silicon Photonics Platform

Bian, Yusheng; Ramachandran, Koushik; Wu, Zhuo-Jie; Hedrick, Brittany; Dezfulian, Kevin; Houghton, Thomas; Nummy, Karen; Fisher, Daniel; Hirokawa, Takako; Donegan, Keith; Afzal, Francis O.; Esopi, Monica R.; Karra, Vaishnavi; Lee, Won Suk; Sorbara, Massimo; Lubguban, Jorge; Cho, Jae Kyu; Cao, Rongtao; Ding, Hanyi; Chandran, Sujith; Rakowski, Michal; Aboketaf, Abdelsalam; Krishnamurthy, S.; Mills, Scott; Peng, Bo; Pepper, Jeff; Deka, Suruj S.; Feng, Wang; Rishton, Steven; Boudreau, Marcel; Logan, Dylan F.; Hickey, Ryan; Gomes, Prova Christina; Murray, K.; Dewanjee, Arnab; Riggs, Dave; Robson, N.; Melville, Ian; Augur, Rod; Fox, Robert; Gupta, Vikas; Yu, Anthony W.; Giewont, Ken; Pellerin, John; Letavic, T.

doi:10.1109/jstqe.2023.3238290

Cited by 11 publications

(1 citation statement)

References 103 publications

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“…In this section, we will first examine each component individually where the theoretical background and simulation results will be presented. [37]; Electric field distribution of the fundamental TE mode of a DC for a symmetric (top row) and asymmetric (bottom row) geometry for (b) a cross-section of 400 nm width, and 250 nm gap, and (c) a cross-section of 300 nm width, and 200 nm gap. The term BEOL refers to the back-end-of-the-line.…”

Section: Device Design and Simulationmentioning

confidence: 99%

Fabrication-Tolerant O-Band WDM Filter With Phase-Balanced Tapered Arms and Wavelength-Independent Couplers

Papadovasilakis,

Chandran,

Gebregiorgis

et al. 2024

J. Lightwave Technol.

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We design, simulate, and experimentally demonstrate a coarse wavelength-division de-multiplexing system based on cascaded Mach-Zehnder interferometers (MZIs) operating in the O-band. The fabricated devices are built on a monolithic silicon photonics platform in a state-of-the-art CMOS foundry. The fabrication tolerance of the device was obtained by a combination of analytical and 3D Finite-difference time-domain (FDTD) methods. Fabrication-tolerant wavelength-independent couplers were used in order to achieve broadband splitting ratios (SRs) and ensure device stability along the entire wavelength range. In addition, phase-balanced linear tapers were used to allow for arbitrary waveguide width values for the MZIs. Experimental results show very high-performance stability across different wafer test sites with a mean channel spectral shift of only 1.03 nm and a total device footprint of 0.582 mm 2 .

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Section: Device Design and Simulationmentioning

confidence: 99%