Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments

Abstract

Areal optical surface topography measurement is an emerging technology for industrial quality control. However, neither calibration procedures nor the utilization of material measures are standardized. State of the art is the calibration of a set of metrological characteristics with multiple calibration samples (material measures). Here, we propose a new calibration sample (artefact) capable of providing the entire set of relevant metrological characteristics within only one single sample. Our calibration artefact features multiple material measures and is manufactured with two-photon laser lithography (direct laser writing, DLW). This enables a holistic calibration of areal topography measuring instruments with only one series of measurements and without changing the sample.

Form deviations caused by lateral displacement errors in annular subaperture stitching interferometry

“…National metrology institutes are working on primary instruments and calibration artifacts to provide the basis of traceable uncertainty statements in industrial applications. 1,2 A universal calibration artifact comprising six different material measures with varying scales for the holistic calibration of an optical instrument employing a single specimen is proposed in Ref. 1.…”

“…1,2 A universal calibration artifact comprising six different material measures with varying scales for the holistic calibration of an optical instrument employing a single specimen is proposed in Ref. 1. The artifact covers typical metrological properties listed in the ISO 25178-600 standard and shows good producibility and aging behavior.…”

Dimensional artefacts to achieve metrological traceability in advanced manufacturing

“…The National Physical Laboratory (NPL) [222] and University of Kaiserslautern (UOK) [84] have independently developed multifeature artefacts that allow the determination of the ISO 25178-600 metrological characteristics, with the exception of topography fidelity (see below). NPL offer the artefact shown in Figure 15 on a silicon substrate along with separate performance verification artefacts on nickel electroformed substrates [189].…”

First of its Kind: A Test Artifact for Direct Laser Writing

“…[2] Only with a coordinated orchestration of positioning tables, optical components and the appropriate control parameters, as well as suitable control software, can an exact replica with the desired properties be fabricated. A wide range of different applications would benefit from the use of test artifacts biomedical applications [3][4][5], optical elements [6][7][8] or microfluidic [9,10] objects fabricated in-place as well as reference structures for roughness measurements [11,12]. In fact, these processes would also have to be coordinated with the materials used, such as hybrid polymers [13], biocompatible hydrogels [14,15] and ceramics [16].…”