3-V Driven Pop-Up Micromirror for Reflecting Light Toward Out-of-Plane Direction for VOA Applications

Lee, Chengkuo; Lin, Yu-Shen; Lai, Yen-Jyh; Tasi, Ming Hung; Chen, Chihchung; Wu, Chia-Yu

doi:10.1109/lpt.2004.824964

Cited by 16 publications

(6 citation statements)

References 11 publications

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“…The WDL at driving voltages of 0 V dc (1.8 dB), 1.5 V dc (10 dB), 2.2 V dc (20 dB) and 2.8 V dc (30 dB) are less than 0.06 dB, 0.31 dB, 0.39 dB and 0.53 dB respectively. These WDL data measured at the various attenuation states are of the same level with those data already reported in [32][33][34][35][36][37][38][39][40][41][42][43][44][45][46][47][48][49].…”

Section: Resultssupporting

confidence: 85%

Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms

Koh

Qian

Lee

2012

J. Micromech. Microeng.

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By using a CMOS compatible process technology, a MEMS variable optical attenuator (VOA) is characterized in terms of actuation mechanisms. A dual-fiber collimator is aligned perpendicularly to the micromirror in a three-dimensional (3D) free space configuration, where the micromirror is mechanically connected with an electromagnetic actuator and two sets of electrothermal actuators. Three types of attenuation schemes based on electromagnetic, electrothermal and hybrid, i.e. combination of electrothermal and electromagnetic, actuations have been explored and studied. Dynamic attenuation ranges of 40 dB have been achieved at 4 V dc , 26 mW and 3 V dc, 20 mW by electromagnetic and electrothermal attenuation schemes respectively. Wavelength-dependent loss has been demonstrated to be less than 0.6 dB at all attenuation states for both attenuation schemes. In the hybrid attenuation scheme, various voltage combinations are made to the electromagnetic and electrothermal actuators. An optical attenuation of approximately 40 dB can be obtained when two volts are applied to both the electromagnetic and electrothermal actuators simultaneously, while the electrical power consumption of the actuators is 17 mW in total. Our unique design of using both electrothermal and electromagnetic actuators simultaneously to achieve attenuation is the first demonstration of such a hybrid-driven CMOS compatible MEMS VOA device.

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Section: Resultssupporting

confidence: 85%

Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms

Koh

Qian

Lee

2012

J. Micromech. Microeng.

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“…The output force and displacement characteristics of thermal microactuators make them ideally suited to meeting the actuation requirements of compliant bistable devices [29], [36]- [38]. They have also been used to power variable optical attenuators [13], [39], and RF switches [40], [41]. Additionally, thermal actuators have been shown to be a stable and repeatable actuator for MEMS nanopositioning applications [42].…”

Section: B Thermomechanical Inplane Microactuatormentioning

confidence: 99%

Piezoresistive Feedback Control of a MEMS Thermal Actuator

Messenger

Aten

McLain

et al. 2009

J. Microelectromech. Syst.

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Feedback control of MEMS devices has the potential to significantly improve device performance and reliability. One of the main obstacles to its broader use is the small number of on-chip sensing options available to MEMS designers. A method of using integrated piezoresistive sensing is proposed and demonstrated as another option. Integrated piezoresistive sensing utilizes the inherent piezoresistive property of polycrystalline silicon from which many MEMS devices are fabricated. As compliant MEMS structure's flex to perform their functions, their resistance changes. That resistance change can be used to transduce the structures' deflection into an electrical signal. The piezoresistive microdisplacement transducer (PMT) is a demonstration structure that uses integrated piezoresistive sensing to monitor the output displacement of a thermomechanical inplane microactuator (TIM). Using the PMT as a feedback sensor for closed-loop control of the TIM provided excellent tracking with no evident steady-state error, maintained the positioning resolution to ±29 nm or less, and increased the robustness of the system such that it was insensitive to significant damage.

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“…With the aim of reducing driving voltage, various Si-based thermal actuators have been developed for VOA applications [36]- [39]. Driving dc voltage as low as 3 V has been reported by using an array of thermalactuator-driven surface-micromachined pop-up mirror [40]. Recently, a large vertical Si mirror (500 µm × 1200 µm) driven by a metal-coil-type electromagnetic actuator has been reported to achieve 40 dB dynamic range under 0.5 V dc load [41].…”

Section: Introductionmentioning

confidence: 99%

A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

Lee

Hsiao

Kobayashi

et al. 2009

IEEE J. Select. Topics Quantum Electron.

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3-V Driven Pop-Up Micromirror for Reflecting Light Toward Out-of-Plane Direction for VOA Applications

Cited by 16 publications

References 11 publications

Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms

Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms

Piezoresistive Feedback Control of a MEMS Thermal Actuator

A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

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