3-D topography simulator (3-D MULSS) based on a physical description of material topography

A fast level set framework for large three-dimensional topography simulations

“…The sets of grid points for the neighboring layers are also updated using (5). Due to the update scheme (6) and due to (4)…”

“…Due to (4) and due to (9) it is also possible to expand the level set structure up to absolute level set values of 1 during the first cycle. However, then still 2 more iterations are needed to expand the structure up to 5 2 . The performance is improved, if defined grid points are added as late as possible to speed up the successive iterations.…”

“…This is a difficult task, especially in three dimensions. Other methods for describing the surface evolution, which base on cells, are the cellular model [3], the building block model [4], the equi-volume rate model [5], or the cellular automata model [6]. A well established method for surface evolution is the level set method [7].…”

Modeling and simulating for 3-D micro-manufacture process

“…For example, some algorithms need too many resources of CPU and memory which common computers can not provide and the calculation will be time-consuming. Another typical trouble in existing models is the ill-conditioned geometric element, such as the intersection of colliding facets [1]. In this paper, a new model is introduced.…”

“…Topography simulations, which establish models to simulate the fabrication processes, are useful as a tool for MEMS design to predict the structure profiles and topography of devices. There are several topography simulators having been investigated in recent years [1][2][3][4] . However, 3-D topography simulation is still faced with many challenges.…”