“…For the optimization of the selected low‐order 3‐D filter, an IL‐SM procedure is used to find an approximate root of the system of nonlinear equations where , X 3D, z is known, X 2D is obtained from in the first sub‐process and is a multidimensional IL vector function ( A i and B i are the coefficient vectors), which is iteratively evaluated through an alignment of the 2‐D and 3‐D EM simulator responses of the selected low‐order filter up to satisfy the error criterion ε where is the square of the Euclidean norm of the error vector e , q is the number of discrete frequency points aligning the discrete response specifications between the 2‐D and 3‐D EM simulator responses and e q is the q th error vector given by …”