Gas sensors based
on semiconductors have outstanding sensitivity
compared with the oxide-based devices; however, the high operation
temperature greatly hinders its development in practical applications.
Chronic obstructive pulmonary disease (COPD) is one of the leading
causes of death worldwide, and the patients with severe COPD with
or without exacerbation tend to have airflow obstruction, which results
in an increase of CO
2
concentration and subsequent hypercapnic
respiratory failure. At present, COPD detection relies on professional
operation; however, the patients suffer great discomfort during the
arterial blood sampling. All these facts reduce patient’s willingness
to test their physical health. Thus, noninvasive monitoring of CO
2
levels is crucial for the early diagnosis of high-risk COPD
patients. A nitrogen-incorporated ultrananocrystalline diamond (NUNCD)
film exhibits excellent properties in biosensing and polyetherimide-polyethylene
glycol (PEI-PEG) polymer possesses a great capability of CO
2
capturing. By incorporating NUNCD into PEI-PEG film, this work focuses
on ameliorating the sensitivity and selectivity of the present semiconductor
CO
2
sensor. From the theoretical regression analyses of
the experimental results, it is found that the excellent performance
of the PEI-PEG/ZnO/NUNCD/Si electrode is contributed by two main reaction
layers, the adsorption layer (PEI-PEG) and the electric transfer layer
(ZnO/NUNCD). The selectivity is dominated by the PEI-PEG adsorption
layer and the sensitivity is directly related to the changes in the
work function of the ZnO/NUNCD interface. The high aspect ratio (>10)
of the flower-like ZnO structure, growth from ZnO nanoparticles, can
provide a more active adsorption area, as a result, extremely enhancing
the sensitivity of the CO
2
sensor.