Fabrication of high edge-definition steel-tape gratings for optical encoders

Abstract

High edge definition of a scale grating is the basic prerequisite for high measurement accuracy of optical encoders. This paper presents a novel fabrication method of steel tape gratings using graphene oxide nanoparticles as anti-reflective grating strips. Roll-to-roll nanoimprint lithography is adopted to manufacture the steel tape with hydrophobic and hydrophilic pattern arrays. Self-assembly technology is employed to obtain anti-reflective grating strips by depositing the graphene oxide nanoparticles on hydrophobic regions. A thin SiO coating is deposited on the grating to protect the grating strips. Experimental results confirm that the proposed fabrication process enables a higher edge definition in making steel-tape gratings, and the new steel tape gratings offer better performance than conventional gratings.

Single-Step Fabrication of Highly Tunable Blazed Gratings Using Triangular-Shaped Femtosecond Laser Pulses

“…The substrates used for machining were 0.5 mm thick polished plates of AISI 304 stainless steel. This material was selected due to its widespread use in the industry and laser processing [ 32 , 33 ], in applications such as steel-tape gratings for optical encoders [ 34 , 35 ].…”