Optimal design of a reflective diffraction grating scale with sine-trapezoidal groove for interferential optical encoders

Ye, Guoyong; Liu, Hongzhong; Lei, Biao; Dong, Ning; Xing, Hongwen; Wei, Pingping; Lu, Bingheng

doi:10.1016/j.optlaseng.2020.106196

Cited by 14 publications

(3 citation statements)

References 35 publications

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“…In order to improve the grating interferometer resolution and measurement accuracy even further, two approaches are commonly utilized: raising the grating groove density and increasing the subdivision multiples (also known as the interpolation factor) for the original signal [7][8][9]. However, due to manufacturing technological restrictions, it is difficult to maintain the regularity of the grating pattern, which impacts the consistency of the grating pitch [10,11]. Additionally, increasing the grating groove density will cause a significant cost increase and lengthen the processing cycle.…”

Section: Introductionmentioning

confidence: 99%

Improving the optical subdivision ability of a grating interferometer via double-row reverse blazed gratings

Zhang

Dong

Zhao

et al. 2023

Optics and Lasers in Engineering

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Section: Introductionmentioning

confidence: 99%

Improving the optical subdivision ability of a grating interferometer via double-row reverse blazed gratings

Zhang

Dong

Zhao

et al. 2023

Optics and Lasers in Engineering

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“…Micro-displacement measurement with high resolution and accuracy has numerous potential applications, such as automotive 1 , robotic system 2 , positioning 3 and medical applications 4 . Techniques based on capacitive 5 , optical 6 – 9 , as well as magnetic sensors 10 – 12 are widely used in non-contact displacement sensing. The capacitive type is susceptible to electromagnetic interference, and parasitic capacitance and fringe effects have been the major issues to improve the performance of the sensor 13 .…”

Section: Introductionmentioning

confidence: 99%

High-precision micro-displacement sensor based on tunnel magneto-resistance effect

Wang

et al. 2022

Sci Rep

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A high-precision micro-displacement sensor based on tunnel magneto-resistance effect is reported.We designed and simulated magnetic characteristics of the sensor, and employed chip-level Au-In bonding to implement low-temperature assembly of the TMR devices. We employed the subdivision interpolation technique to enhance the resolution by translating the sine-cosine outputs of a TMR sensor into an output that varies linearly with the displacement. Simultaneously, using the multi-bridge circuit method to suppress external magnetic and geomagnetic interference. Experimental result shows that the micro-displacement sensor has a resolution of 800 nm, accuracy of 0.14$$\%$$ % and a full-scale range of up to millimeter level. This work enables a high-performance displacement sensor, and provides a significant guide for the design of a micro-displacement sensor in practical applications.

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“…Common multi-degree-of-freedom precision positioning equipment usually includes optical and electrical measurement solutions [10][11][12][13]. Compared with electrical sensors such as capacitance and inductance, optical solutions are easier to achieve the large range measurement, which mainly include spectral confocal technology, laser interferometer and grating encoder [14][15]. Spectral confocal technology is mainly used in single-axis micro-displacement measurement and the topography measurement [16][17][18]; the resolution of laser interferometers can reach picometer level, but the optical path structure of laser interferometers is relatively cumbersome, and the measurement accuracy is relatively dependent on the environment [19][20].…”

Section: Introductionmentioning

confidence: 99%

An ultra-precision error estimation for a multi-axes grating encoder using quadrant photodetectors

Luo

Gao²,

Wang³

et al. 2022

Optical Metrology and Inspection for Industrial Applications IX

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For expanding the measurement range and improvement of accuracy of multi-axes grating encoder, a mathematical model of measurement angle and diffraction spot with QPD was established. We proposed a light spot position calculation method with consideration of both the optimized composite algorithm of laser beam feature of Gaussian distribution and the QPD diagonal algorithm. In this method, we use the piecewise polynomial fitting method to fit and solved the parameters of the traditional Infinite integral algorithm and the Boltzmann function fitting algorithm. Meanwhile, we introduce a weight factor and use the Composite algorithm to compensate the spot position error. Based on the given QPD model and the basic parameters of the laser beam, simulation works are carried out and results show that the maximum error of the spot position can reduce to be an order of 10-6 mm within the 2 mm measurement range using piecewise cubic polynomial fitting, around 10% of the traditional methods.

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Optimal design of a reflective diffraction grating scale with sine-trapezoidal groove for interferential optical encoders

Cited by 14 publications

References 35 publications

Improving the optical subdivision ability of a grating interferometer via double-row reverse blazed gratings

Improving the optical subdivision ability of a grating interferometer via double-row reverse blazed gratings

High-precision micro-displacement sensor based on tunnel magneto-resistance effect

An ultra-precision error estimation for a multi-axes grating encoder using quadrant photodetectors

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