2017
DOI: 10.1186/s11671-017-1921-3
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RBS Depth Profiling Analysis of (Ti, Al)N/MoN and CrN/MoN Multilayers

Abstract: (Ti, Al)N/MoN and CrN/MoN multilayered films were synthesized on Si (100) surface by multi-cathodic arc ion plating system with various bilayer periods. The elemental composition and depth profiling of the films were investigated by Rutherford backscattering spectroscopy (RBS) using 2.42 and 1.52 MeV Li2+ ion beams and different incident angles (0°, 15°, 37°, and 53°). The microstructures of (Ti, Al)N/MoN multilayered films were evaluated by X-ray diffraction. The multilayer periods and thickness of the multil… Show more

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Cited by 15 publications
(10 citation statements)
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“…Recently, CrN/MoN coating has been deposited on 12X18H9T stainless steel using Vacuum arc evaporation method by Pogrebnjak et al [109]. Multilayers of chromium and molybdenum are believed to induce the high value of hardness [110][111][112][113][114][115][116], and the observation on the well-defined multilayer structure of this study confirms it. The coating exerts high hardness value at 42.3 GPa, due to Hall-Petch strengthening mechanism.…”
Section: Hybridsupporting
confidence: 76%
“…Recently, CrN/MoN coating has been deposited on 12X18H9T stainless steel using Vacuum arc evaporation method by Pogrebnjak et al [109]. Multilayers of chromium and molybdenum are believed to induce the high value of hardness [110][111][112][113][114][115][116], and the observation on the well-defined multilayer structure of this study confirms it. The coating exerts high hardness value at 42.3 GPa, due to Hall-Petch strengthening mechanism.…”
Section: Hybridsupporting
confidence: 76%
“…The addition of self-lubricating elements such as molybdenum and vanadium various nitride coating created a new path for high speed machining by improving friction properties and boosting the service tool life. Lower coefficient of friction and higher wear resistance were observed in numerous V and Mo-alloyed based nitride coatings, such as CrN/Mo 2 N, TiAlN/MoN [10], CrN/MoN [11], and TiAlN/MoN [12]. The coefficient of friction and anti-wear of these coatings could be improved especially at high temperatures by the formation of lubricant oxides of MoO 3 and V 2 O 5 [13].…”
Section: Introductionmentioning
confidence: 99%
“…Bin Han et al [22] report of the analysis of Ti 0.7 Al 0.3 N/MoN and CrN/MoN multilayer films on Si(001) substrates using RBS. The incident ions used were 2.42 MeV and 1.52 MeV Li 2+ ions at varying incident angles.…”
Section: Rbs Analysis Of Ti 07 Al 03 N/mon and Crn/mon Multilayer Filmsmentioning
confidence: 99%