Scalable Fabrication of Multiplexed Plasmonic Nanoparticle Structures Based on AFM Lithography

Chen, Jianmei; Sun, Yinghui; Zhong, Liubiao; Shao, Weijing; Huang, Jing; Liang, Feng; Cui, Zequn; Liang, Zhiqiang; Jiang, Lin; Chi, Lifeng

doi:10.1002/smll.201602250

Cited by 27 publications

(15 citation statements)

References 61 publications

(76 reference statements)

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“…Thus, the multidipole system reproducibly arranges itself to reach an electrostatic equilibrium, keeping the energy of the system at the minimum level. Future study of this effect is warranted (including the potential influence of electrohydrodynamic flow), but we propose that the self‐assembly of beads into symmetric patterns may someday be useful for making photonic crystals or plasmonic structures …”

Section: Resultsmentioning

confidence: 99%

Patterned Optoelectronic Tweezers: A New Scheme for Selecting, Moving, and Storing Dielectric Particles and Cells

Zhang

Shakiba

Chen

et al. 2018

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Optical micromanipulation has become popular for a wide range of applications. In this work, a new type of optical micromanipulation platform, patterned optoelectronic tweezers (p‐OET), is introduced. In p‐OET devices, the photoconductive layer (that is continuous in a conventional OET device) is patterned, forming regions in which the electrode layer is locally exposed. It is demonstrated that micropatterns in the photoconductive layer are useful for repelling unwanted particles/cells, and also for keeping selected particles/cells in place after turning off the light source, minimizing light‐induced heating. To clarify the physical mechanism behind these effects, systematic simulations are carried out, which indicate the existence of strong nonuniform electric fields at the boundary of micropatterns. The simulations are consistent with experimental observations, which are explored for a wide variety of geometries and conditions. It is proposed that the new technique may be useful for myriad applications in the rapidly growing area of optical micromanipulation.

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Section: Resultsmentioning

confidence: 99%

Patterned Optoelectronic Tweezers: A New Scheme for Selecting, Moving, and Storing Dielectric Particles and Cells

Zhang

Shakiba

Chen

et al. 2018

Small

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“…Thanks to the advances in nanofabrication technologies, these low‐cost, large‐area, and mass‐productive techniques have sped up the development of static metadevices and are gradually becoming mature. We believe that a variety of emerging techniques and clever designs can also be adopted for metasurfaces, such as scanning probe lithography, laser direct writing, laser‐induced forward transfer, the multilayer electroplating technique, multiphoton lithography, nanostencil lithography, phase‐shifting photolithography, shadow‐mask lithography etc. With the incorporation of functional materials, tunable or reconfigurable metasurfaces further bring more exciting and versatile functionalities for broader applications.…”

Section: Discussionmentioning

confidence: 99%

Fundamentals and Applications of Metasurfaces

2017

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Metasurfaces have become a rapidly growing field of research in recent years due to their exceptional abilities in light manipulation and versatility in ultrathin optical applications. They also significantly benefit from their simplified fabrication process compared to metamaterials and are promising for integration with on‐chip nanophotonic devices owing to their planar profiles. The recent progress in metasurfaces is reviewed and they are classified into six categories according to their underlying physics for realizing full 2π phase manipulation. Starting from multi‐resonance and gap‐plasmon metasurfaces that rely on the geometric effect of plasmonic nanoantennas, Pancharatnam–Berry‐phase metasurfaces, on the other hand, use identical nanoantennas with varying rotation angles. The recent development of Huygens' metasurfaces and all‐dielectric metasurfaces especially benefit from highly efficient transmission applications. An overview of state‐of‐the‐art fabrication technologies is introduced, ranging from the commonly used processes such as electron beam and focused‐ion‐beam lithography to some emerging techniques, such as self‐assembly and nanoimprint lithography. A variety of functional materials incorporated to reconfigurable or tunable metasurfaces is also presented. Finally, a few of the current intriguing metasurface‐based applications are discussed, and opinions on future prospects are provided.

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“…However, their high cost, complex preparation required accuracy and high time consumption limit their employment in potential applications . Thus, fully controlling the LSPR of different types of metal nanoparticles (size, shape, or composition) in a device using facile techniques that involve low equipment cost and high throughput, are crucial to intensively study and apply LSPR in devices …”

Section: Introductionmentioning

confidence: 99%

Growing In‐Plane Multiplex Plasmonic Arrays for Synergistic Enhanced Photocurrent Response

Liang

Sun

et al. 2019

Adv Materials Inter

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A complete control of the localized surface plasmon resonance (LSPR) properties of different types of metal nanoparticles (size, shape, or composition) in a device by facile techniques with high throughput is crucial to intensively study and apply the LSPR effects to improve device performance. Here, a versatile approach is presented to fabricate macroscopic and in‐plane multiplex arrays of plasmonic nanoparticles with well‐defined particle size or composition allocation. The polymer layer (poly(N‐isopropylacrylamide), PNIPAM) spin‐coated on the surface of the substrate is applied as a protective layer to control the growth of the Au nanoparticles in a dip‐coating procedure. The relative contribution of LSPR of each particle type can be controlled by selectively adjusting the particle size or composition at the desired position of multiplex arrays on the same substrate. A synergistic enhanced photocurrent response is observed in the metal–semiconductor system, which is attributed to broadened LSPR enhancement of multiplex composition (Au and Au@Ag) structures from the same substrate. The fabrication procedure presented in this study is highly repeatable and feasible for preparing ordered multiplex nanostructures on the same substrate. Furthermore, this method provides a cost‐effective and versatile platform for design of multiplex plasmonic nanostructures in sensing, solar energy conversion, and optical processing applications.

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Scalable Fabrication of Multiplexed Plasmonic Nanoparticle Structures Based on AFM Lithography

Cited by 27 publications

References 61 publications

Patterned Optoelectronic Tweezers: A New Scheme for Selecting, Moving, and Storing Dielectric Particles and Cells

Patterned Optoelectronic Tweezers: A New Scheme for Selecting, Moving, and Storing Dielectric Particles and Cells

Fundamentals and Applications of Metasurfaces

Growing In‐Plane Multiplex Plasmonic Arrays for Synergistic Enhanced Photocurrent Response

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