2018 IEEE International Electron Devices Meeting (IEDM) 2018
DOI: 10.1109/iedm.2018.8614566
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22-nm FD-SOI Embedded MRAM Technology for Low-Power Automotive-Grade-l MCU Applications

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Cited by 37 publications
(13 citation statements)
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“…As the MTJ size scales down, the energy barrier to switch the FL decreases, which in turn increases its bit-to-bit variation, hence degrading data retention 47 . In principle, intrinsic interfacial PMA (Fig.…”
Section: Interfacial Pma and Synthetic Antiferromagnetsmentioning
confidence: 99%
“…As the MTJ size scales down, the energy barrier to switch the FL decreases, which in turn increases its bit-to-bit variation, hence degrading data retention 47 . In principle, intrinsic interfacial PMA (Fig.…”
Section: Interfacial Pma and Synthetic Antiferromagnetsmentioning
confidence: 99%
“…This is quite a big challenge in common to many types of eEMs, because intrinsic temperature dependence of data retention performance is large by large activation energy at the cell, and data retention is inseparably linked with cell current (that is, rewrite power and cell scalability) and endurance. R&Ds to realize high data retention capability in reasonable balance with other trade-off factors have been intensively conducted for eFlash replacement [33]- [36]. Regarding eSRAM replacement, key requirements are 1) higher endurance (e.g.…”
Section: Perspective Of Envm Candidates In the Future;mentioning
confidence: 99%
“…For wider and more diverse applications, such as flash-like applications, STT-MRAM will require higher operating temperature and data retention. GlobalFoundries and TSMC announced their progress in flash-like MRAM, and the coercive field is higher than 3000 Oe, which sets a higher requirement for the reliability of the SAF. The seed layer is crucial for obtaining a SAF with appropriate crystallographic orientation and good texture quality, which will also transfer to the barrier layer and free layer. A single NiCr film, as seed layer, was positively identified for achieving high PMA in a [Co/Ni]-based SAF. However, in a [Co/Pt]-based SAF and MRAM product, the effect of seed materials is still to be verified and further optimized.…”
Section: Introductionmentioning
confidence: 99%