2013 25th International Symposium on Power Semiconductor Devices &Amp; IC's (ISPSD) 2013
DOI: 10.1109/ispsd.2013.6694427
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200V superjunction lateral IGBT fabricated on partial SOI

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Cited by 10 publications
(1 citation statement)
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“…To achieve high efficiency and small chip size, on-chip HV switches with low area-specific on-resistance and low parasitic capacitances are required. Besides HV lateral SJ-MOSFETs [29], more and more HV technologies offer HV lateral SJ-LIGBTs [30]. As part of this work, both options are explored.…”
Section: B Hv-switch Typesmentioning
confidence: 99%
“…To achieve high efficiency and small chip size, on-chip HV switches with low area-specific on-resistance and low parasitic capacitances are required. Besides HV lateral SJ-MOSFETs [29], more and more HV technologies offer HV lateral SJ-LIGBTs [30]. As part of this work, both options are explored.…”
Section: B Hv-switch Typesmentioning
confidence: 99%