2013 19th IEEE Pulsed Power Conference (PPC) 2013
DOI: 10.1109/ppc.2013.6627403
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20 kV, 2 cm<sup>2</sup>, 4H-SiC gate turn-off thyristors for advanced pulsed power applications

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Cited by 36 publications
(23 citation statements)
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“…Research-level SiC device prototypes with blocking voltage capabilities above 15 kV have been demonstrated using floating field/guard rings (FFR/FGR) [6], [13]- [15], multi-zone (MZ)-JTE [16]- [18], optimized implantationfree (O)-JTE [19], negative bevel based (NB)-JTE [20], [21], and space-modulated (SM)-JTE [7]- [10], [22] termination structures, offering each design concept with its specific set of advantages and disadvantages. The floating guard-ring structure is processed without additional manufacturing steps but requires more than 100 rings for devices with > 10 kV blocking voltage capability [23], [24].…”
Section: Assessment Of Junction Termination Extension Structures For Ultrahigh-voltage Silicon Carbidementioning
confidence: 99%
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“…Research-level SiC device prototypes with blocking voltage capabilities above 15 kV have been demonstrated using floating field/guard rings (FFR/FGR) [6], [13]- [15], multi-zone (MZ)-JTE [16]- [18], optimized implantationfree (O)-JTE [19], negative bevel based (NB)-JTE [20], [21], and space-modulated (SM)-JTE [7]- [10], [22] termination structures, offering each design concept with its specific set of advantages and disadvantages. The floating guard-ring structure is processed without additional manufacturing steps but requires more than 100 rings for devices with > 10 kV blocking voltage capability [23], [24].…”
Section: Assessment Of Junction Termination Extension Structures For Ultrahigh-voltage Silicon Carbidementioning
confidence: 99%
“…Further simplifications are provided by negative bevel termination structures (and smoothly tapered structures [31]), which are area-efficient and facilitate low leakage currents. These structures are, however, mainly targeting p-type thyristor structures [20], [21], [32]. Termination structures that combine guard-rings with single/multiple JTE regions (i.e., ring-assisted-JTEs [26], [33], hybrid-JTE [26] SM-JTE [7], [10], multiple-ring-modulated JTE [34], and counter-doped (CD)-JTE [25]) provide high breakdown voltages (i.e., close to ideal VB,PP) in combination with a wide dose margin, yet with a small process increase [25], [26].…”
Section: Assessment Of Junction Termination Extension Structures For Ultrahigh-voltage Silicon Carbidementioning
confidence: 99%
See 1 more Smart Citation
“…Secondly, SiC has a high thermal conductivity of 3.9 W/cm 2 K as compared to 1.3 W/cm 2 K for GaN at room temperature which is a major benefit to heat dissipation in power devices. [8][9][10][11][12] Despite the limitations of GaN technology, GaN power devices have a major advantage over their SiC counterpart when it comes to electron mobility and high-speed switching capability. A typical SiC metal oxide semiconductor field effect transistor (MOSFET) has a typical channel electron mobility of 28 cm 2 /V s due to surface defects and scattering effects, whereas the 2D electron gas (2DEG) formed in a GaN HEMT has a nominal electron mobility of 2000 cm 2 /V s. [13][14][15][16][17] This significantly higher mobility in a GaN HEMT (almost 70 9 that of a SiC MOSFET) permits high conduction current density through the device for a given active area leading to a much smaller die size.…”
Section: Introductionmentioning
confidence: 99%
“…SiC MOSFETs have reached 15 kV blocking voltage capability [4]. Bipolar SiC devices have reached beyond 20 kV blocking voltage capability in research laboratories, for example 7-39 kV PiN diodes [5], 27.5 kV integrated-gate bipolar transistors (IGBT) [6], 20 kV gate turn-off thyristors (GTO) [7], and 22 kV Emitter turn-off (ETO) thyristors [8].…”
Section: Introductionmentioning
confidence: 99%