2. Trends in the development and use of turbomolecular pumps

Henning, J.

doi:10.1016/s0042-207x(78)80004-9

Cited by 7 publications

(1 citation statement)

References 2 publications

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“…Stator Most probable velocity Turbomolecular pumps (TMPs) are the main equipment used for obtaining and maintaining high or ultrahigh vacuum environments; they have various advantages, including simple operation, fast start-up, and no oil pollution, and they are widely applied in many applications, such as wafer fabrication, the integrated circuit industry, vacuum coating and surface processing technology [1][2][3] . The position and role of TMPs in the development of modern high-end industry are very important.…”

Section: B4mentioning

confidence: 99%

Structural optimization and flow field analysis of turbomolecular pump based on a new performance prediction algorithm

Sun,

Deng,

Wang

et al. 2024

Sci Rep

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In the present study, a new turbomolecular pump (TMP) performance prediction algorithm is proposed according to the variable surface combined blade row (VSCBR) geometric model. The simulation calculation program is designed to perform structural optimization and flow field analysis. Research on the pumping performance of the traditional straight blade row (TSBR) indicates that when the blade velocity ratio is greater than 1, the increase in the pumping speed and compression ratio of the TMP gradually tends to stabilize. Response surface methodology is used to optimize the structural parameters of the first four stages of the combined blade row. The optimized VSCBR increases the pumping speed by 18.2% compared to that of the TSBR. The flow field analysis based on the optimized VSCBR shows that gas molecules reaching the rear blades are likely to approach the outlet, and the proportion of gas molecules in this region exceeds 50%. Therefore, the blades we designed should be conducive to additional gas molecules reaching the outlet.

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Section: B4mentioning

confidence: 99%