Structural optimization and flow field analysis of turbomolecular pump based on a new performance prediction algorithm
Kun Sun,
Haishun Deng,
Cheng Wang
et al.
Abstract:In the present study, a new turbomolecular pump (TMP) performance prediction algorithm is proposed according to the variable surface combined blade row (VSCBR) geometric model. The simulation calculation program is designed to perform structural optimization and flow field analysis. Research on the pumping performance of the traditional straight blade row (TSBR) indicates that when the blade velocity ratio is greater than 1, the increase in the pumping speed and compression ratio of the TMP gradually tends to … Show more
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