17.3% efficient black silicon solar cell without dielectric antireflection coating

Zhao, Zengchao; Li, Ping; Wei, Yi; Lu, Chunxi; Tan, Xin; Liu, Aimin

doi:10.1016/j.solener.2014.10.029

Cited by 23 publications

(14 citation statements)

References 18 publications

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“…In 2014, C. Wang et al [ 48 ] also fabricated double-layered black silicon by alkaline anisotropic etching and MACE. In 2014, Z. Zhao et al [ 49 ] fabricated black silicon by MACE. It was also the first to use an alkaline etching method to form a micro pyramid morphology on the surface, and then to form micro holes in the micro pyramid structure by etching solution with silver ions.…”

Section: Fabrication Techniquesmentioning

confidence: 99%

Recent Progress of Black Silicon: From Fabrications to Applications

et al. 2020

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Since black silicon was discovered by coincidence, the special material was explored for many amazing material characteristics in optical, surface topography, and so on. Because of the material property, black silicon is applied in many spheres of a photodetector, photovoltaic cell, photo-electrocatalysis, antibacterial surfaces, and sensors. With the development of fabrication technology, black silicon has expanded in more and more applications and has become a research hotspot. Herein, this review systematically summarizes the fabricating method of black silicon, including nanosecond or femtosecond laser irradiation, metal-assisted chemical etching (MACE), reactive ion etching (RIE), wet chemical etching, electrochemical method, and plasma immersion ion implantation (PIII) methods. In addition, this review focuses on the progress in multiple black silicon applications in the past 10 years. Finally, the prospect of black silicon fabricating and various applications are outlined.

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Section: Fabrication Techniquesmentioning

confidence: 99%

Recent Progress of Black Silicon: From Fabrications to Applications

et al. 2020

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“…Monocrystalline photovoltaic cells, among all kinds of silicon photovoltaic cells, are characterized by the highest efficiency but also the highest production costs [10]. The efficiency of photovoltaic cell prototypes in laboratory tests is up to 24%, while the efficiency of the mass produced 17% [2,11]. Cells made of polycrystalline silicon have lower efficiency and lower manufacturing cost than those made of monocrystalline silicon because of the absence of the costs associated with the energy-intensive single crystal manufacturing process [12,13].…”

Section: Introductionmentioning

confidence: 99%

Efficiency of Laser-Shaped Photovoltaic Cells

et al. 2020

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The main aim of this paper is to analyze the influence of laser shaping of the photovoltaic cell based on its efficiency. The authors described both process of the monocrystalline photovoltaic cell manufacturing, its efficiency, and the possibilities of usage in architecture and the process of creating the photovoltaic cells of unconventional shapes by using laser technology. A method for cutting photovoltaic cells using a fiber laser was presented as well as the parameters of the laser cutting process. The described method allows cutting the massively produced silicon cells according to the predetermined trajectory. Using the proposed process parameters, satisfactory cutting edge quality, and negligible impact of the laser beam on changes in the structure of the photovoltaic cell active layers were achieved. In each cycle of structure cutting, only a small part of the material is removed (from 1 to 2 μm), and depending on the thickness, the process is repeated from 50 to 300 times. It has been shown that the efficiency of the modified cells depends on the ratio of their surface area to the laser cutting line.

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“…Black− Si wafers have been produced using reactive ion etching [1][2][3][4], metal-assisted chemical etching [5][6][7][8][9][10], stain etching [11], electrochemical etching [11,12], vapor chemical etching [13], surface structure chemical transfer (SSCT) [14][15][16], etc. Reactive ion etching [1][2][3][4] requires an expensive apparatus, and throughput is considerably low, leading to high fabrication costs.…”

Section: Introductionmentioning

confidence: 99%

“…Using stain etching, electrochemical etching, and vapor chemical etching, porous Si is produced [11][12][13], resulting in ultralow reflectance, while high conversion efficiencies exceeding 17% have not been achieved most probably due to poor electrical characteristics of porous Si. Metal-assisted chemical etching [5][6][7][8][9][10] mainly uses silver (Ag) particles on Si immersed in hydrofluoric acid (HF) plus hydrogen peroxide (H 2 O 2 ) solutions, and due to the promoted reaction by Ag, Ag moves into Si, forming cylindrical pore structure. The demerits of this method may be: (i) -difficulty of control of pore direction, (ii)-difficulty of complete removal of Ag, and (iii) -difficulty in the fabrication of high quality pnjunction, and (iv) -high surface area, resulting in high surface recombination rates.…”

Section: Introductionmentioning

confidence: 99%

“…For surface passivation of black− Si, formation of an SiO 2 layer [5,10], deposition an Al 2 O 3 layer [2,4,8,19], and deposition of silicon nitride (SiN) layer [1,3,6] have been investigated. Another method to decrease the surface recombination rate utilizes wet chemical etching to enlarge pore sizes [5,9]. Matsumura et al , [20] removed the cylindrical pore layer formed on multicrystalline Si (multi− Si) wafers by alkaline etching.…”

Section: Introductionmentioning

confidence: 99%

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High conversion efficiency of crystalline Si solar cells using black − Si fabricated by SSCT method

Imamura

Onitsuka

Sakae

et al. 2017

Journal of Electrical Engineering

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We have developed a technology for fabrication of black − Si by use of the surface structure chemical transfer (SSCT) method. The ultralow reflectance below 3% results from formation of a graded porosity structure of a nanocrystalline Si layer formed by the SSCT method. The nanocrystalline Si layer with an extremely large surface area is effectively passivated by deposition of phosphosilicate glass (PSG) followed by heat treatment at 925 • C . After PSG passivation, the minority carrier lifetime greatly increases, and the internal quantum efficiency in the short wavelength region is also greatly increased. Using the SSCT method and the PSG passivation method, the high conversion efficiency of 19.7% is achieved.K e y w o r d s: surface structure chemical transfer, black Si, Si solar cells, surface passivation, reflectance, phosphosilicate glass

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17.3% efficient black silicon solar cell without dielectric antireflection coating

Cited by 23 publications

References 18 publications

Recent Progress of Black Silicon: From Fabrications to Applications

Recent Progress of Black Silicon: From Fabrications to Applications

Efficiency of Laser-Shaped Photovoltaic Cells

High conversion efficiency of crystalline Si solar cells using black − Si fabricated by SSCT method

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