1550 nm high contrast grating VCSEL

Chase, Christopher; Rao, Yi; Hofmann, Werner; Chang-Hasnain, Connie J.

doi:10.1364/oe.18.015461

Cited by 100 publications

(47 citation statements)

References 17 publications

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“…A single-layer ultra-thin HCG with broadband high reflectivity for surface-normal incidence was first proposed with numerical simulation [6], followed by experimental demonstration of HCG having reflectivity >98.5% over a wavelength span of Δλ/λ>35% [7]. The HCG is subsequently incorporated as the top mirror in vertical cavity surface emitting lasers (VCSELs) emitting at 850 nm, 980 nm, 1330 nm and 1550 nm wavelength regimes, replacing traditional multi-layer distributed Bragg reflectors (DBR) [17][18][19][20][21][22][23][24][25][26][27][28][29][30]. This HCG top mirror is naturally a microelectromechanical structure (MEMS), and can be electrostatically actuated.…”

Section: Introduction To High Contrast Gratingmentioning

confidence: 99%

High-contrast gratings for integrated optoelectronics

Chang-Hasnain¹,

Yang²

2012

Adv. Opt. Photon.

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471

171

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Integrated optoelectronics has seen its rapid development in the past decade. From its original primary application in long-haul optical communications and access network, integrated optoelectronics has expanded itself to data center, consumer electronics, energy harness, environmental sensing, biological and medical imaging, industry manufacture control etc. This revolutionary progress benefits from the advancement in light generation, manipulation, detection and its interaction with other systems. Device innovation is the key in this advancement. Together they build up the component library for integrated optoelectronics, which facilities the system integration.High contrast grating (HCG) is an emerging element in integrated optoelectronics. Compared to the other elements, HCG has very rich properties and design flexibility. Some of them are fascinating and extraordinary, such as broadband high reflectivity, and high quality factor resonance -all it needs is a single thin-layer of HCG. Furthermore, it can be a microelectromechanical structure. These rich properties are readily to be harnessed and turned into novel devices.This dissertation is devoted to investigate the physical origins of the extraordinary features of HCG, and explore its applications in novel devices for integrated optoelectronics. An intuitive picture will be presented to explain the HCG physics. The essence of HCG lies in its superb manipulation of light, which can be coupled to applications in light generation and detection. Various device innovations, such as lowloss hollow-core waveguide, fast optical phased array, tunable VCSEL and detector are demonstrated with the HCG as a key element. This breadth of functionality of HCG suggests that HCG has reached beyond a single element in integrated optoelectronics; it has enabled a new platform for integrated optoelectronics.

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Section: Introduction To High Contrast Gratingmentioning

confidence: 99%

High-contrast gratings for integrated optoelectronics

Chang-Hasnain¹,

Yang²

2012

Adv. Opt. Photon.

Self Cite

471

171

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“…However, Drexler et al 3 point out, that the perfect SS does not exist. The existing MEMS VCSEL designs [4][5][6][7] are based on the III-V wafers, which are small, expensive and challenging to work with. In addition, the actuating part (MEMS) is on the top and is open to the working environment until packaged.…”

Section: Introductionmentioning

confidence: 99%

Wavelength tunable MEMS VCSELs for OCT imaging

Sahoo¹,

Ansbæk²,

Ottaviano³

et al. 2018

Vertical-Cavity Surface-Emitting Lasers XXII

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MEMS VCSELs are one of the most promising swept source (SS) lasers for optical coherence tomography (OCT) and one of the best candidates for future integration with endoscopes, surgical probes and achieving an integrated OCT system. However, the current MEMS-based SS are processed on the III-V wafers, which are small, expensive and challenging to work with. Furthermore, the actuating part, i.e., the MEMS, is on the top of the structure which causes a strong dependence on packaging to decrease its sensitivity to the operating environment. This work addresses these design drawbacks and proposes a novel design framework. The proposed device uses a high contrast grating mirror on a Si MEMS stage as the bottom mirror, all of which is defined in an SOI wafer. The SOI wafer is then bonded to an InP III-V wafer with the desired active layers, thereby sealing the MEMS. Finally, the top mirror, a dielectric DBR (7 pairs of TiO 2 -SiO 2 ), is deposited on top. The new device is based on a silicon substrate with MEMS defined on a silicon membrane in an enclosed cavity. Thus the device is much more robust than the existing MEMS VCSELs. This design also enables either a two-way actuation on the MEMS or a smaller optical cavity (pull-away design), i.e., wider FSR (Free Spectral Range) to increase the wavelength sweep. Fabrication of the proposed device is outlined and the results of device characterization are reported.

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“…5 In all those cases, the top mirror consisted of an HCG in combination with a few DBR k/4-thick layer pairs to boost the reflectivity. Recently, there have been some reports where lasing has been achieved under electrical injection in devices where the top DBR has been completely replaced by an HCG, such as a GaAs/air HCG VCSEL emitting at 1060 nm (Ref.…”

Section: Introductionmentioning

confidence: 99%

TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime

Hashemi

Bengtsson

Gustavsson

et al. 2015

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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In this work, the authors describe a novel route to achieve a high reflectivity, wide bandwidth feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high contrast gratings in TiO2, with SiO2 as a sacrificial layer. The TiO2 film deposition and the etching processes are developed to yield grating bars without bending, and with near-ideal rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high contrast gratings show very good agreement with simulations, with a high reflectivity of >95% over a 25 nm wavelength span centered around 435 nm for the transverse-magnetic polarization.

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1550 nm high contrast grating VCSEL

Cited by 100 publications

References 17 publications

High-contrast gratings for integrated optoelectronics

High-contrast gratings for integrated optoelectronics

Wavelength tunable MEMS VCSELs for OCT imaging

TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime

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