128&amp;#x00D7;128 3D-MEMS optical switch module with simultaneous optical paths connection for optical cross-connect systems

Mizukami, Masahiro; Yamaguchi, Joji; Nemoto, Naru; Kawajiri, Yuko; Hirata, Hirooki; Uchiyama, Sadao; Makihara, Mitsuhiro; Sakata, Tomomi; Shimoyama, Nobuhiro; Ishii, H.; Shimokawa, Fusao

doi:10.1109/ps.2009.5307744

Cited by 8 publications

(2 citation statements)

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“…Nevertheless, many of the existing 3D micromirrors have these frequencies unbalanced. For instance, the heavy gimbal structure used by NTT Microsystem Integration Laboratories [36,37] significantly shifts the second natural frequency of the micromirror to lower frequencies, as it can be clearly seen in step responses about the x and y axis presented in [36]. A newly developed 512×512 MEMS switch reported in late of 2012 [10] utilizes these micromirrors.…”

Section: D Mems Micromirrors In Praxismentioning

confidence: 99%

MEMS optical switch: Switching time reduction

Plander

Stepanovsky

2016

Open Computer Science

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Existing 3D MEMS-based optical switches offer good optical properties (low insertion loss, low crosstalk), high reliability and low power consumption. These switches utilize highly reflective micro-mirrors to manipulate an optical signal inside the switch directly without any conversions. They are used to build dynamically reconfigurable, highly-scalable physical optical network layer. As indicated by the simulation results of this paper, many of existing micro-mirror designs do not have their dynamic characteristics well optimized and this limits the switching speed of the optical switch. In a 3D MEMS switch, the coupling between the mechanical structure (micro-mirror) and electrostatic field (electrodes) results in dynamic coupled rotation of the micro-mirror about its axes, known as the cross-axis coupling effect. The coupling nature of micro-mirror rotation makes its control difficult. In this paper, we present the simulation case studies and a simple optimization technique leading to decoupled rotation of the micro-mirror about two perpendicular axes. This helps to reduce the switching time of the switch while keeping the same manufacturing process and only minimal design changes.

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Section: D Mems Micromirrors In Praxismentioning

confidence: 99%

MEMS optical switch: Switching time reduction

Plander

Stepanovsky

2016

Open Computer Science

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“…It consists of a two-axis MEMS tilt mirror array and an optical fiber collimator array. 4 Optical beams from input ports are collimated by the collimator array and reflected by the two-axis MEMS tilt array. Connection between any input port and any output port can be achieved by controling the tilt angle of each mirror.…”

Section: Introductionmentioning

confidence: 99%

High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules

2011

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Downloaded From: http://opticalengineering.spiedigitallibrary.org/ on 05/15/2015 Terms of Use: http://spiedl.org/terms Optical Engineering 50(7), 074001 (July 2011)Abstract. For optical axis alignment when light deflection control of a MEMS mirror is done at high speed, we propose a method based on identifying the quadratic surface shape. The method uses information about the optical power monitored when the mirror is inclined to a small angle. It is shown that the search for maximum optical power is possible by using this method. We also designed a control system with a band-stop filter for resonance frequency to decrease residual vibration generated when the mirror is moved at high speed. We confirm that the searchable level of optical power can be improved. C 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

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Advanced three-dimensional MEMS photonic cross-connect switch for nonblocking all-optical networks

Plander

Stepanovsky

2016

Optical Switching and Networking

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128×128 3D-MEMS optical switch module with simultaneous optical paths connection for optical cross-connect systems

Cited by 8 publications

References 1 publication

MEMS optical switch: Switching time reduction

MEMS optical switch: Switching time reduction

High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules

Advanced three-dimensional MEMS photonic cross-connect switch for nonblocking all-optical networks

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