High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules

Abstract

Downloaded From: http://opticalengineering.spiedigitallibrary.org/ on 05/15/2015 Terms of Use: http://spiedl.org/terms Optical Engineering 50(7), 074001 (July 2011)Abstract. For optical axis alignment when light deflection control of a MEMS mirror is done at high speed, we propose a method based on identifying the quadratic surface shape. The method uses information about the optical power monitored when the mirror is inclined to a small angle. It is shown that the search for maximum optical power is possible by using this method. We also designed a control system with a band-stop filter for resonance frequency to decrease residual vibration generated when the mirror is moved at high speed. We confirm that the searchable level of optical power can be improved. C 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).