1060-nm Tunable Monolithic High Index Contrast Subwavelength Grating VCSEL

Ansbæk, Thor; Chung, Il-Sug; Semenova, Elizaveta; Yvind, Kresten

doi:10.1109/lpt.2012.2236087

Cited by 48 publications

(32 citation statements)

References 10 publications

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“…A single-layer ultra-thin HCG with broadband high reflectivity for surface-normal incidence was first proposed with numerical simulation [6], followed by experimental demonstration of HCG having reflectivity >98.5% over a wavelength span of Δλ/λ>35% [7]. The HCG is subsequently incorporated as the top mirror in vertical cavity surface emitting lasers (VCSELs) emitting at 850 nm, 980 nm, 1330 nm and 1550 nm wavelength regimes, replacing traditional multi-layer distributed Bragg reflectors (DBR) [17][18][19][20][21][22][23][24][25][26][27][28][29][30]. This HCG top mirror is naturally a microelectromechanical structure (MEMS), and can be electrostatically actuated.…”

Section: Introduction To High Contrast Gratingmentioning

confidence: 99%

“…This HCG top mirror is naturally a microelectromechanical structure (MEMS), and can be electrostatically actuated. Monolithic, continuously tunable HCG-VCSELs have been demonstrated at 850 nm, 1060 nm and 1550 nm [20,22,23,28,29]. With the same epitaxial structure, the tunable HCG-VCSEL can be operated as a tunable detector [31].…”

Section: Introduction To High Contrast Gratingmentioning

confidence: 99%

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High-contrast gratings for integrated optoelectronics

Chang-Hasnain¹,

Yang²

2012

Adv. Opt. Photon.

471

171

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Integrated optoelectronics has seen its rapid development in the past decade. From its original primary application in long-haul optical communications and access network, integrated optoelectronics has expanded itself to data center, consumer electronics, energy harness, environmental sensing, biological and medical imaging, industry manufacture control etc. This revolutionary progress benefits from the advancement in light generation, manipulation, detection and its interaction with other systems. Device innovation is the key in this advancement. Together they build up the component library for integrated optoelectronics, which facilities the system integration.High contrast grating (HCG) is an emerging element in integrated optoelectronics. Compared to the other elements, HCG has very rich properties and design flexibility. Some of them are fascinating and extraordinary, such as broadband high reflectivity, and high quality factor resonance -all it needs is a single thin-layer of HCG. Furthermore, it can be a microelectromechanical structure. These rich properties are readily to be harnessed and turned into novel devices.This dissertation is devoted to investigate the physical origins of the extraordinary features of HCG, and explore its applications in novel devices for integrated optoelectronics. An intuitive picture will be presented to explain the HCG physics. The essence of HCG lies in its superb manipulation of light, which can be coupled to applications in light generation and detection. Various device innovations, such as lowloss hollow-core waveguide, fast optical phased array, tunable VCSEL and detector are demonstrated with the HCG as a key element. This breadth of functionality of HCG suggests that HCG has reached beyond a single element in integrated optoelectronics; it has enabled a new platform for integrated optoelectronics.

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Section: Introduction To High Contrast Gratingmentioning

confidence: 99%

Section: Introduction To High Contrast Gratingmentioning

confidence: 99%

High-contrast gratings for integrated optoelectronics

Chang-Hasnain¹,

Yang²

2012

Adv. Opt. Photon.

471

171

View full text Add to dashboard Cite

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“…An anti-reflection coating (ARC) using a low refractive index material such as SiON with proper thickness at the III-V/airgap interface can increase the wavelength setting range of VCSELs [12]. However, the deposition of an extra ARC layer on the III-V epitaxy makes the fabrication of the whole device complicated, as selective etching of SiO 2 to the ARC is difficult.…”

Section: Wavelength Setting Rangementioning

confidence: 99%

Integration of GaAs-based VCSEL array on SiN platform with HCG reflectors for WDM applications

et al. 2015

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We present a GaAs-based VCSEL structure, BCB bonded to a Si 3 N 4 waveguide circuit, where one DBR is substituted by a free-standing Si 3 N 4 high-contrast-grating (HCG) reflector realized in the Si 3 N 4 waveguide layer. This design enables solutions for on-chip spectroscopic sensing, and the dense integration of 850-nm WDM data communication transmitters where individual channel wavelengths are set by varying the HCG parameters. RCWA shows that a 300nm-thick Si 3 N 4 HCG with 800nm period and 40% duty cycle reflects strongly (>99%) over a 75nm wavelength range around 850nm. A design with a standing-optical-field minimum at the III-V/airgap interface maximizes the HCG's influence on the VCSEL wavelength, allowing for a 15-nm-wide wavelength setting range with low threshold gain (<1000 cm -1 ).

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“…The first electrically pumped 1060nm MEMS VCSELs were reported by a Danish group in 2013 30 , achieving 24 nm dynamic tuning range. Our group recently demonstrated 48.5 nm continuous tuning range and 67nm discontinuous tuning range at 1060nm.…”

Section: Electrically Pumped 1060nm Mems-vcselsmentioning

confidence: 99%

Recent advances in MEMS-VCSELs for high performance structural and functional SS-OCT imaging

et al. 2014

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Since the first demonstration of swept source optical coherence tomography (SS-OCT) imaging using widely tunable micro-electromechanical systems vertical cavity surface-emitting lasers (MEMS-VCSELs) in 2011, VCSEL-based SS-OCT has advanced in both device and system performance. These advances include extension of MEMS-VCSEL center wavelength to both 1060nm and 1300nm, improved tuning range and tuning speed, new SS-OCT imaging modes, and demonstration of the first electrically pumped devices. Optically pumped devices have demonstrated continuous singlemode tuning range of 150nm at 1300nm and 122nm at 1060nm, representing a fractional tuning range of 11.5%, which is nearly a factor of 3 greater than the best reported MEMS-VCSEL tuning ranges prior to 2011. These tuning ranges have also been achieved with wavelength modulation rates of >500kHz, enabling >1 MHz axial scan rates. In addition, recent electrically pumped devices have exhibited 48.5nm continuous tuning range around 1060nm with 890kHz axial scan rate, representing a factor of two increase in tuning over previously reported electrically pumped MEMS-VCSELs in this wavelength range. New imaging modes enabled by optically pumped devices at 1060nm and 1300nm include full eye length imaging, pulsatile Doppler blood flow imaging, high-speed endoscopic imaging, and hand-held wide-field retinal imaging.

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1060-nm Tunable Monolithic High Index Contrast Subwavelength Grating VCSEL

Cited by 48 publications

References 10 publications

High-contrast gratings for integrated optoelectronics

High-contrast gratings for integrated optoelectronics

Integration of GaAs-based VCSEL array on SiN platform with HCG reflectors for WDM applications

Recent advances in MEMS-VCSELs for high performance structural and functional SS-OCT imaging

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