2017
DOI: 10.1109/jlt.2016.2593942
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100-Gbps RZ Data Reception in 67-GHz Si-Contacted Germanium Waveguide p-i-n Photodetectors

Abstract: Abstract-We demonstrate 100-Gbps silicon-contacted germanium waveguide p-i-n photodetectors integrated on imec's silicon photonics platform. The performance of 14 and 20 µm long devices is compared. The responsivity of the devices is 0.74 and 0.92 A/W at 1550 nm, respectively.

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Cited by 75 publications
(53 citation statements)
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“…Compared to previous waveguide arrangements where carriers were generated in the entire area limited only by metal contacts (Fig. 7a, b) [20][21][22][23][24] (without a bias voltage ( Fig. 7a) and under a bias voltage (Fig.…”
Section: Symmetric and Asymmetric Electrodesmentioning
confidence: 80%
See 1 more Smart Citation
“…Compared to previous waveguide arrangements where carriers were generated in the entire area limited only by metal contacts (Fig. 7a, b) [20][21][22][23][24] (without a bias voltage ( Fig. 7a) and under a bias voltage (Fig.…”
Section: Symmetric and Asymmetric Electrodesmentioning
confidence: 80%
“…Conventional Ge waveguide photodetectors require deposition of metal contacts on Ge. This process, however, introduce a significant losses what influence device responsivity [21][22][23]. To reduce these losses, new Ge PIN waveguide photodetectors were proposed that exploit lateral Silicon/Germanium/Silicon (Si/Ge/Si) heterojunctions.…”
Section: Germanium Photodetectorsmentioning
confidence: 99%
“…Input light is end-fire coupled from an input silicon nitride (Si 3 N 4 ) rectangular waveguide, which has high transmittivity at visible wavelengths [9]. We choose this input coupling geometry over a phase-matched interlayer transition, commonly used in integrated photodetectors for infrared wavelengths [11], [18], as the latter is difficult to achieve due to the large difference in refractive indices for Si (n = 3.8) and Si 3 N 4 (n = 2.1). An input coupling efficiency of >90% at the Si/Si 3 N 4 interface is obtained using 3D Finite Difference Time Domain (FDTD) simulations (Lumerical).…”
Section: Waveguide-coupled Spad Designs a Device Geometrymentioning
confidence: 99%
“…Still, silicon photonics processes are now considered to be sufficiently good for a number of applications, as is demonstrated by products released on the market. The various fabs provide processes for silicon waveguides with acceptable propagation losses around 1‐2 dB cm −1 , thermal tuners with phase shifter efficiencies ranging from 100 µW π1 to 100 mW π1, carrier‐based electro‐optic modulators working in both travelling wave and resonant modes, and Germanium photodetectors with efficiencies of 1AW1, with both modulators and detectors operating at high‐speeds of many tens of gigahertz. Spectral filters can be implemented using combinations of waveguides and coupling structures .…”
Section: Introductionmentioning
confidence: 99%