Carbeto de Silício como Material Base para Sensores MEMS de Uso Aeroespacial: Uma Visão Geral

Fraga,; Pessoa, Rodrigo Sávio; Massi, M.; Maciel, Homero Santiago

doi:10.1590/s1517-70762014000300011

Cited by 6 publications

(4 citation statements)

References 22 publications

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“…O carbeto de silício é um material cerâmico semicondutor e tem características de absorção de ondas eletromagnéticas [16,17] devido às suas perdas dielétricas. Além disto, o SiC é inerte quimicamente, apresenta resistência à oxidação [2,4,18] e estabilidade química [2,3,17,19].…”

Section: Introductionunclassified

“…Desta forma, trabalhos que utilizam borracha de silicone como matriz são escassos, independente dos aditivos utilizados. Tão pouco há pesquisas sobre a influência da adição do negro de fumo ao carbeto de silício em matriz de silicone na faixa de frequência da banda K u (12,4 -18,0 GHz), faixa de frequência de interesse em áreas de telecomunicação [7,16], aeroespacial [5,17,19] e aeronáutica [1,9,22].…”

Section: Introductionunclassified

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Caracterização eletromagnética do compósito de carbeto de silício e negro de fumo em matriz polimérica

Medeiros

Souza

et al. 2021

Matéria (Rio J.)

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RESUMO Este trabalho apresenta as propriedades eletromagnéticas de um Material Absorvedor de Radiação Eletromagnética (MARE) feito a partir de Carbeto de Silício (SiC) e Negro de Fumo (NF) como aditivos. O compósito SiC/NF foi produzido utilizando 70 %(m/m) de matriz de silicone, e variando as concentrações do aditivo em 3 %(m/m), 2 %(m/m) e 1 %(m/m) de NF com 27 %(m/m), 28 %(m/m) e 29 %(m/m) de SiC, respectivamente. A estrutura química e a morfologia das partículas de SiC e NF foram analisadas através de espectroscopia Raman e Microscopia Eletrônica de Varredura (MEV). As propriedades dielétricas dos MAREs foram obtidas por meio do analisador de rede vetorial na faixa de frequência de 12,4 a 18,0 GHz. Os resultados de refletividade mostraram que o compósito SiC/NF com 1 %(m/m) de NF apresentou a melhor absorção de radiação eletromagnética, chegando a -47,9 dB em 16,8 GHz com uma amostra de aproximadamente 5,5 mm de espessura.

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Section: Introductionunclassified

Caracterização eletromagnética do compósito de carbeto de silício e negro de fumo em matriz polimérica

Medeiros

Souza

et al. 2021

Matéria (Rio J.)

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“…This defect has limited the design and fabrication of MEMS devices, especially if MEMS applications require high mechanical properties. As reported by many researchers, ceramics exhibit good mechanical strength in MEMS devices operating in extreme environments, [8][9][10][11][12][13] such as silicon carbide (SiC), silicon nitride (Si 3 N 4 ) and silicon oxide (SiO 2 ).…”

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Microfabrication and Characterization of High Tensile Strength SiC Whisker-Reinforced Nickel Composite Coatings by Electrodeposition

Lai

et al. 2019

J. Electrochem. Soc.

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Metal matrix composite materials with SiC whiskers are considered as the reinforcement materials for the future electronic devices. However, today, these materials are mostly produced at high temperature and high pressure (HTHP) environments, these procedures are not only costly but may also alter the microstructure. In order to explore an economically more viable approach of fabrication of multilayer movable complicated microstructures, SiC whiskers-reinforced nickel matrix composites (Ni/SiCw) coatings were prepared by electrolytic co-deposition method. The surface morphology and mechanical properties of the electrodeposited coatings, fabricated in both absence and presence of SiC whisker, were studied. Morphology studies showed a homogenous presence of the whisker intercalated at the surface of the nickel matrix; this was further confirmed from the results of XPS and TEM, which also demonstrated that the insertion of the whisker went from the surface to inside. Moreover, it was found that the embedded whiskers significantly affect mechanical properties of the composite coatings: the ultimate tensile strength of Ni/SiCw composite was 2.6 times higher than that of pure Ni, and the elastic modulus improved by 42% with 0.8 g/L of SiC whiskers in the bath. These results reveal the promising potential of electrodeposited metal-SiC whiskers composite materials for micro-mechanical devices application.

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“…de motores e refratários; sendo que, nestes casos, a temperatura de aplicação varia entre 600 e 2000 °C 12,13,14,15,16 .…”

Section: Resistência Ao Choque Térmico De Carbeto De Silício Sinterizadounclassified

Resistência ao choque térmico de carbeto de silício sinterizado via fase líquida

Mello¹

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The behavior of ceramic materials towards thermal shock resistance is a topic of great interest, due to applications in which the reliability against sudden temperature variations is required. In this thesis, it was studied how the variation in the proportion of Y 2 O 3 :Al 2 O 3 additives and different parameters on the processing of liquid phase sintered silicon carbide may influence thermal shock resistance of this material. Samples were prepared with molar composition 90%SiC+10%Y 2 O 3 :Al 2 O 3 , by varying oxides molar proportion between 2:1 and 1:4, with and without previous reaction of the additives. Mixtures were compacted and sintered in a resistive graphite furnace at 1750, 1850 and 1950°C, and by hot pressing at 1750 and 1850°C, and evaluated for densification. After analysis of the first results, pressureless sintering and the mixtures with proportions of 1:3 and 1:4 of previously reacted Y 2 O 3 :Al 2 O 3 were selected for the study of thermal shock resistance. Thermal cycles were performed by heating at temperatures of 600, 750 and 900°C and sudden cooling in water at room temperature. The evaluation of samples regarding thermal shock resistance was conducted by determination of elasticity modulus, porosity, flexural strength and microstructural analysis of the cracks. The samples sintered at 1950°C temperature are those that exhibit the best performance in relation to thermal shock resistance, while the variation in the proportions Y 2 O 3 :Al 2 O 3 from 1:3 to 1:4 do not significantly change this property. Under the conditions used, the maximum temperature for liquid phase sintered SiC application must be limited to 750°C, which allows its use as a component of heat exchanges, bearings, pump bearings, gas turbines and sensors of automotive and aeronautical engines.

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Carbeto de Silício como Material Base para Sensores MEMS de Uso Aeroespacial: Uma Visão Geral

Cited by 6 publications

References 22 publications

Caracterização eletromagnética do compósito de carbeto de silício e negro de fumo em matriz polimérica

Caracterização eletromagnética do compósito de carbeto de silício e negro de fumo em matriz polimérica

Microfabrication and Characterization of High Tensile Strength SiC Whisker-Reinforced Nickel Composite Coatings by Electrodeposition

Resistência ao choque térmico de carbeto de silício sinterizado via fase líquida

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