Influência da limpeza prévia por sputtering na nitretação por plasma de aços inoxidáveis

Reis, Ricardo Fernando dos; Neidert, R.

doi:10.1590/s1517-70762011000200004

Cited by 2 publications

(3 citation statements)

References 6 publications

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“…and C 2 H x /C 3 H x peaks since molecule configuration, with the intensity increasing as a function of the increase in applied potency. NOMINÉ [7] also showed the disruption of the non-aromatic L-proline ring, with no branching of the carbon chains after analyzing the residual products of degradation in a post-discharge microwave plasma.,…”

Section: Resultsmentioning

confidence: 97%

“…As an alternative technique, there is the plasma cleaning technology, which has been the object of study of several works [2][3][4][5][6][7] and shown to be an efficient technique in degradation of compounds with different organic functions. Plasma cleaning technologies are already being used in the cleaning of inputs in the semiconductor sectors [8], food industry [9], medical [10,11], sputtering printed circuit boards [12], surface modification [13][14][15][16] and nitriding [17,18].…”

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confidence: 99%

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Influence of applied plasma power on degradation of L-proline in an inductively coupled RF plasma reactor

et al. 2022

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Surface treatments such as heat treatments, paints, plasma treatments and galvanizing are important in metal working industry. In those treatments, the required adhesion characteristics can be limited if contaminants are present, so there is a need to clean these surfaces. Conventional processes can be costly, some generated waste may be environmentally hazardous and, in some cases, due to part geometry, they are not effective. Alternatively, plasma treatments which are considered to be environmentally clean, more efficient and with lower operating costs can overcome those difficulties. Due to the reactional complexity of these treatments, there are many fields to be researched, such as which reactions are due to impacts of (neutral) chemical species and which are due to excited species and radiation. The present work aims to verify the interactions between Ar-10%O 2 plasma using amino acid L-proline in an inductively coupled radiofrequency plasma. This study showed that oxidative plasma promotes high degradation of the sample. A gas analyzer (quadrupole mass spectrometer) coupled to the gas outlet was used and many gaseous products are detected during treatment, such: H 2 , H 2 O, CO, NO (Nitric Oxide) and CO 2 while L-proline undergoes intense degradation. The conclusions allow to state that the interaction between the Ar/O 2 plasma and L-proline promotes intense degradation through the breakdown of the heterocyclic ring of the molecule.

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Section: Resultsmentioning

confidence: 97%

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Influence of applied plasma power on degradation of L-proline in an inductively coupled RF plasma reactor

et al. 2022

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“…Este fato esta relacionado à ineficiência do hidrogênio como agente de sputtering, conforme já discutido em trabalho anterior [27]. Considerou-se, então, que a variação entre a etapa de limpeza por ultrassom e a condição pós-processamento está associada à absorção de nitrogênio durante a nitretação.…”

Section: Ganho Percentual De Massaunclassified

Nitretação por plasma do aço ISO 5832-1 em alta temperatura: Influência do tempo de tratamento e sua aplicação no processo "SHTPN"

2013

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RESUMOCorpos de prova de aço inoxidável ISSO 5832-1 foram nitretados em uma atmosfera de 90% vol. N2 + 10% vol. H2, a uma temperatura de 870ºC. Os tempos de processamento estudados foram 1, 3 e 5 h. Utilizaram-se as seguintes técnicas de análise: difração de raios-x (DRX), microscopia eletrônica de varredura (MEV) e microdureza Vickers, além da análise da variação de massa. Os resultados indicaram um crescimento difusivo da camada composta. O aumento do tempo promoveu uma maior incorporação de nitrogênio no material, porém, devido à maior difusão em volume e a consequente formação de camadas mais espessas, fases mais pobres nesse elemento foram identificadas. Verificou-se, ainda, uma diminuição da dureza da camada nitretada com o aumento do tempo de tratamento. O ganho de massa, bem como o crescimento da camada nitretada, foi crescente com o tempo de tratamento. Dentre os tempos estudados, o que mais se adequou ao posterior tratamento de "SHTPN" foi o de 3h, principalmente devido ao tamanho de grão, associado à incorporação de nitrogênio obtida. Palavras-chave:Nitretação por plasma, aços inoxidáveis, ISO 5832-1, SHTPN. ABSTRACTSamples of stainless steel ISO 5832-1 were nitrided in a gas mixture of 90% N2 + 10% H2 at a temperature of 870ºC. The treatment times were 1, 3 and 5 hours. Treated samples were characterized by means of X-ray diffraction (XRD), scanning electron microscopy (SEM) and Vickers microhardness, as well as analyze of the mass variation. The results indicated the diffusion growth of the compound layer. The increased time promoted a greater uptake of nitrogen in the material, however, due to higher bulk diffusion and the consequent formation of thicker layers, phases poor in this element were identified. There was also a decrease in hardness of the nitrided layer with increasing treatment time. The gain in mass, as well as growth of the nitrided layer, increased with treatment time. For the subsequent SHTPN treatment the nitriding time of 3 h was the most suitable, mainly due to grain size, associated with the obtained nitrogen incorporation.

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Influência da limpeza prévia por sputtering na nitretação por plasma de aços inoxidáveis

Cited by 2 publications

References 6 publications

Influence of applied plasma power on degradation of L-proline in an inductively coupled RF plasma reactor

Influence of applied plasma power on degradation of L-proline in an inductively coupled RF plasma reactor

Nitretação por plasma do aço ISO 5832-1 em alta temperatura: Influência do tempo de tratamento e sua aplicação no processo "SHTPN"

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