Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores

Chen, Peng; Mitsui, Toshiyuki; Farmer, Damon B.; Golovchenko, Jene Andrew; Gordon, Roy G.; Branton, Daniel

doi:10.1021/nl0494001

Cited by 400 publications

(459 citation statements)

References 23 publications

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“…The synthesis of the new cathode architecture was done using ALD, a technique for preparing thin films that employs self-limiting chemical reactions between gaseous precursors and a solid surface allowing atomic scale control over the film thickness and composition 27 . One of the distinguishing attributes of ALD is the capability to deposit coatings on surfaces with complex topographies and to infiltrate mesoporous materials, important for the Al 2 O 3 coatings used for the cathode in this study [28][29][30] . The ALD technique can also be used to synthesize supported noble metal catalysts, such as Pd used in this work, in the size range from subnanometres to nanometres [31][32][33][34] .…”

Section: Resultsmentioning

confidence: 99%

A nanostructured cathode architecture for low charge overpotential in lithium-oxygen batteries

et al. 2013

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The lithium-oxygen battery, of much interest because of its very high-energy density, presents many challenges, one of which is a high-charge overpotential that results in large inefficiencies. Here we report a cathode architecture based on nanoscale components that results in a dramatic reduction in charge overpotential to B0.2 V. The cathode utilizes atomic layer deposition of palladium nanoparticles on a carbon surface with an alumina coating for passivation of carbon defect sites. The low charge potential is enabled by the combination of palladium nanoparticles attached to the carbon cathode surface, a nanocrystalline form of lithium peroxide with grain boundaries, and the alumina coating preventing electrolyte decomposition on carbon. High-resolution transmission electron microscopy provides evidence for the nanocrystalline form of lithium peroxide. The new cathode material architecture provides the basis for future development of lithium-oxygen cathode materials that can be used to improve the efficiency and to extend cycle life.

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Section: Resultsmentioning

confidence: 99%

A nanostructured cathode architecture for low charge overpotential in lithium-oxygen batteries

et al. 2013

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“…Presumably air is trapped inside the nanopore when the reservoirs on either side are filled with liquid, since degassing our buffer solutions leads to the same observed phenomena. Our notion might explain the noise reduction of nanopores following an atomic layer deposition of the hydrophilic alumina observed by Chen et al [10]. We suggest that nanobubbles cause a strong increase in the low-frequency current noise due to nucleation, movement along the nanopore surface, and/or dissolution [25].…”

Section: -2mentioning

confidence: 77%

“…Fabricated solid-state nanopores have obvious advantages over their biological counterparts, i.e., size control, increased stability, and the potential of device integration. However, they also show undesirable phenomena such as a large variability in conductance [4] and noise [10,11], both as a function of time and among samples.…”

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confidence: 99%

Nanobubbles in Solid-State Nanopores

et al. 2006

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From conductance and noise studies, we infer that nanometer-sized gaseous bubbles (nanobubbles) are the dominant noise source in solid-state nanopores. We study the ionic conductance through solid-state nanopores as they are moved through the focus of an infrared laser beam. The resulting conductance profiles show strong variations in both the magnitude of the conductance and in the low-frequency noise when a single nanopore is measured multiple times. Differences up to 5 orders of magnitude are found in the current power spectral density. In addition, we measure an unexpected double-peak ionic conductance profile. A simple model of a cylindrical nanopore that contains a nanobubble explains the measured profile and accounts for the observed variations in the magnitude of the conductance.

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“…[1][2] Although much work has been devoted to the reduction of aperture diameters to count smaller and smaller biological objects, [3][4][5][6][7][8][9][10] the next challenge remains to combine size control with local chemical functionality to achieve specific counting and detection. The initial solution to this problem was provided by the use of α-hemolysin, a cellular membrane protein that self-assembles in lipid bilayers to form a 1.5 nm diameter pore.…”

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confidence: 99%