2013
DOI: 10.1364/oe.21.019530
|View full text |Cite
|
Sign up to set email alerts
|

10 Gbps silicon waveguide-integrated infrared avalanche photodiode

Abstract: We have fabricated monolithic silicon avalanche photodiodes capable of 10 Gbps operation at a wavelength of 1550 nm. The photodiodes are entirely CMOS process compatible and comprise a p-i-n junction integrated with a silicon-on-insulator (SOI) rib waveguide. Photo-generation is initiated via the presence of deep levels in the silicon bandgap, introduced by ion implantation and modified by subsequent annealing. The devices show a small signal 3 dB bandwidth of 2.0 GHz as well as an open eye pattern at 10 Gbps.… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

5
31
1

Year Published

2014
2014
2022
2022

Publication Types

Select...
6
1

Relationship

1
6

Authors

Journals

citations
Cited by 41 publications
(37 citation statements)
references
References 10 publications
5
31
1
Order By: Relevance
“…The absolute values of responsivity are modest, as one would expect for such large waveguides (4.7μm height, 3.5μm width and 3.1μm slab height), with the results being consistent with those reported by Doylend et al [29]. These results are in fact extremely encouraging and suggest that small cross-section detectors (currently being designed by the authors) should provide responsivities >1A/W, and bandwidths of 10Gbps when operated in the avalanche regime [27]. The trend for responsivity as a function of implantation dose for these types of detectors is dominated by a trade-off between increasing absorption with increasing dose (and defect concentration), and a degradation in diode electrical characteristics as the dose is increased (a result of carrier recombination).…”
Section: Photodetectionsupporting
confidence: 84%
See 2 more Smart Citations
“…The absolute values of responsivity are modest, as one would expect for such large waveguides (4.7μm height, 3.5μm width and 3.1μm slab height), with the results being consistent with those reported by Doylend et al [29]. These results are in fact extremely encouraging and suggest that small cross-section detectors (currently being designed by the authors) should provide responsivities >1A/W, and bandwidths of 10Gbps when operated in the avalanche regime [27]. The trend for responsivity as a function of implantation dose for these types of detectors is dominated by a trade-off between increasing absorption with increasing dose (and defect concentration), and a degradation in diode electrical characteristics as the dose is increased (a result of carrier recombination).…”
Section: Photodetectionsupporting
confidence: 84%
“…Even with this decrease in sensitivity, there is a significant attraction for using these types of detectors in optical links using extended wavelengths. Indeed, in light of the recent demonstration of avalanche detection for a wavelength of 1.55μm [27], we may reasonably expect a DC responsivity >1A/W for the 2-2.5μm range for a device with an optimised geometry and bias.…”
Section: Photodetectionmentioning
confidence: 99%
See 1 more Smart Citation
“…Although many of these ion implanted PDs have demonstrated improved performance when operating in the avalanche regime [8,27], we did not see any indication of improved performance with higher biases on these or in our previous work with Si + -implanted PDs [12]. The lack of clear avalanche multiplication is believed to be due to the device structure and implantation, as there was significant overlap in the doped "wings" of the device and the implantation region.…”
Section: Discussioncontrasting
confidence: 66%
“…This is the highest demonstrated bit rate for an integrated detector in the 1.81-2.04 µm gain window of this optical amplifier, and was accomplished with a silicon waveguide utilizing defect-mediated absorption, which extends the cutoff wavelength beyond the intrinsic value of 1.1 µm via deep levels. Such detectors have been explored at wavelengths around 1.55 µm, with devices showing high responsivity at 10 Gbit s -1 when operated in the avalanche mode 15,16 . Due to the relatively weak interaction of sub-bandgap light with lattice defects, the detectors require absorption regions on the order of hundreds of micrometres in length.…”
mentioning
confidence: 99%