A hybrid electromagnetic actuator with an air mount is designed so as to achieve the desired isolation reduce the vibration efficiency on the floor vibration. The performance specification of the hybrid electromagnetic actuator is determined based on the vibration criterion for vibration-sensitive equipment. In the design stage of the electromagnetic actuator, the simple reluctance method is adapted to analyze magnetic circuits. The result is verified by finite element analysis using ANSYS Emag. Finally, in order to confirm the design performance, a dynamic characteristic test is carried out for the prototype of a hybrid electromagnetic actuator.
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