Phase-measuring deflectometry is a full-field gradient measuring technique that lends itself very well to testing specular optical surfaces. We have measured deformation of a large specular surface by deflectometry. In this work, we have used a Fourier-transform method to get the phase from a measured deformed fringe pattern, and we have used least squares method to obtain the height information of the specular surface from the calculated slope. Experimentally, we have confirmed that deflectometry can be used for deformation measurement of a specular surface like that of a wafer.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.