In order to produce size-controllable Ag nanoparticles and a nanomesh-patterned Si substrate, we introduce a rapid thermal annealing(RTA) method and a metal assisted chemical etching(MCE) process. Ag nanoparticles were self-organized from a thin Ag film on a Si substrate through the RTA process. The mean diameter of the nanoparticles was modulated by changing the thickness of the Ag film. Furthermore, we controlled the surface energy of the Si substrate by changing the Ar or H 2 ambient gas during the RTA process, and the modified surface energy was evaluated through water contact angle test. A smaller mean diameter of Ag nanoparticles was obtained under H 2 gas at RTA, compared to that under Ar, from the same thickness of Ag thin film. This result was observed by SEM and summarized by statistical analysis. The mechanism of this result was determined by the surface energy change caused by the chemical reaction between the Si substrate and H 2 . The change of the surface energy affected on uniformity in the MCE process using Ag nanoparticles as catalyst. The nanoparticles formed under ambient Ar, having high surface energy, randomly moved in the lateral direction on the substrate even though the etching solution consisting of 10 % HF and 0.12 % H 2 O 2 was cooled down to −20 o C to minimize thermal energy, which could act as the driving force of movement. On the other hand, the nanoparticles thermally treated under ambient H 2 had low surface energy as the surface of the Si substrate reacted with H 2 . That's why the Ag nanoparticles could keep their pattern and vertically etch the Si substrate during MCE.
In this research, characteristic properties of gel time and homo gel strength of liquid chemical grouting material for soil grouting using non-cement binder(NCB) were measured according to kinds of liquid B's Binders, W/B of liquid B's Binders and the volume ratio between liquid A and liquid B in order to examine on the applicability of soil grouting material using non-cement binder. The test was performed using NCB-1, NCB-2, NCB-3 which are environment-friendly inorganic binders developed by means of collaboration by our research team and which are different from chemical composition ratio each other. In conclusion, it was found that NCB could be applied to liquid soil grouting material using non-cement binder and replace ordinary portland cement, because NCB had the most excellent performance in certain section of gel time and homo gel strength in condition of this experiment.
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