In order to achieve a sub-micron scale displacement adjustment in the field of precision adjustment using the laser bending technology, a laser micro displacement adjustment and measuring platform is built. A fiber laser is focused on the metal sample using fθ lens and moves at constant velocity in a line direction through a galvanometer. The output displacement of the sample′ s free end is measured in real time. A simple closed-form model of laser micro displacement adjustment is established. The effect of laser power, scanning velocity, defocus distance and position of laser irritating on the output displacement is investigated. The experimental results show that an adjustment displacement with submicron scale repeatability on the metal plate sample can be realized in this platform and the best choice to achieve precision adjustment is to adjust the position of laser irritating. An adjustment with little damage to the sample surface is achieved through optimizing the process parameters.
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