It is well known that Nd Fe B magnet shows high performance as permanent magnets. It has been applied for various products such as sensors, actuators, and the motors for hybrid and electric vehicles, because of its high magnetocrystalline anisotropy and high saturation magnetization. From environmental issues, further high performance permanent magnet is needed. However, the coercivity of Nd Fe B magnets has reached only about 20 of the theoretical values. In order to understand the magnetization process of Nd Fe B alloys, the control of the grain size and the grain boundary is of importance. In this work, Nd Fe B/Nd Cu thin films and circular dot arrays with 2 mm in diameter have been prepared by using ultra high vacuum sputtering system, electron beam lithography and Ar ion etching system and their magnetic properties have been investigated. Remarkable difference of the magnetization process between the Nd Fe B thin films with and without Nd Cu additional layer was observed.
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