Unlike traditional methods of fabrication of the planar superconducting structures based on YBCO films, in which etching or ion implantation is used to form the topology, in the method of preliminary topology mask (TM), the topology is set at the initial stage of the structure manufacturing process, during the formation of TM, and the deposition of YBCO is its final stage. Superconducting elements of the structure are formed in the windows of the TM, and insulating regions are formed between them. In this paper, having fixed the topology of superconducting bridges at the stage of the formation of TM, we measured their characteristics depending on the thickness of the YBCO film, sequentially conducting deposition cycles. After each YBCO deposition, the structural parameters of the film as well as the critical temperature and current at the bridges, including those with Josephson contacts formed on the bicrystalline substrate, were measured.
This work is devoted to the study of epitaxial YBCO films obtained by laser sputtering during deposition of YBCO into the windows of the special preliminary topology mask. The morphology of the surface of the obtained structures was studied by electron microscopy, the electrical characteristics of superconducting bridges were measured: the critical temperature and the critical current density. The possibility of forming YBCO structures of a given topology with defect-free regions of micron sizes while maintaining high electrophysical parameters of the superconductor is shown. This opens up the possibility of reproducibly forming submicron-scale elements in the created defect-free areas using ion etching or ion implantation.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.