In this work, thin films of vanadyl phthalocyanines (VOPc and VOPcF4) are studied as active layers for the detection of gaseous ammonia and hydrogen. The effect of F-substituents on the structural features of vanadyl phthalocyanine films and their sensor response toward ammonia (10–50 ppm) and hydrogen (100–500 ppm) is investigated by X-ray diffraction (XRD) and chemiresistive methods, respectively. It is shown that the sensor response of VOPcF4 films to ammonia is 2–3 times higher than that of VOPc films. By contrast, the sensor response to hydrogen is higher in the case of VOPc films. Apart from this, the hybrid structures of vanadyl phthalocyanine films with Pd nanoparticles deposited on their surface by a chemical vapor deposition method are also tested to reveal the effect of Pd nanoparticles on the sensitivity of VOPc films to hydrogen. Deposition of Pd nanoparticles on the surface of VOPc films leads to the noticeable increase of their sensitivity to hydrogen.

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