The technological prospects for the creation of a system of microfocus X-ray tubes with the use of silicon field emission of nanocathodes have been discussed. A numerical analysis of the field-emission current from a nanoscale semiconductor cathode regulated by voltage on a grid electrode has been carried out on the basis of which a scheme for controlling the elements of the matrix of field-emission cathode assemblies has been proposed. The current–voltage characteristics of silicon field emission nanocathodes have been measured. They are in good agreement with the theoretical estimates of the field-emission current. A full technological cycle of the development of elements of microfocus X-ray tubes (a set of field-emission cathode assemblies and a set of anode assemblies) has been performed. The results can be used to create systems of microfocus X-ray tubes for nanolithographic equipment of a new generation.
Using atomic force microscopy (AFM), we experimentally examined the features of field-electron emission from a single point-type silicon cathode into a quasi-vacuum (air) medium. In the non-contact AFM operating mode, the current – voltage characteristics (CVCs) of a single cathode with a nanometer radius of curvature of the tip were measured at distances of 10 nm and 20 nm between the cathode tip and the top of the measuring probe. The electric field distribution was simulated both on the surface of the tip of a single cathode and on the surface of the tips of individual cathodes within the array, based on which a theoretical estimate of the field enhancement factor as a function of the cathode-probe distance was made. The field-enhancement factor calculated from the experimental CVCs in the Fowler-Nordheim coordinates is several orders of magnitude higher than its value obtained from theoretical calculations. Such a mismatch between the experimental data and the simulation results indicates the need to take into account additional quantum-size effects, which play an important role in the formation of the field-electron emission current in the nanoscale gap. In particular, deformation of the silicon emitter tip can occur at this scale due to the penetration of a strong electric field into its surface region, which, in turn, causes the distortion of the potential barrier at the interface with the quasi-vacuum medium.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.