The algorithm for solving the problem of local surface shape errors correction by small-size ion beam is proposed in the paper. The algorithm involves a sequential search of heights relative to the average value with the aim to find the most optimal etching point that satisfies the criterion - reducing the sum of the modules of the derivatives on the etching spot. It is shown that the new approach makes it possible to significantly expand the range of spatial frequencies that can be influenced at a given size of the ion beam.
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