Àííîòàöèÿ. Ñ ïîìîùüþ ðàñòðîâî-ýëåêòðîíîé ìèêðîñêîïèè (ÐÝÌ), ðåíãåíî-ñòðóêòóðíî-ãî àíàëèçà (ÐÑÀ), àäãåçèîííîé ïðî÷íîñòè, êîýôôèöèåíòà òðåíèÿ è ñêîðîñòè èçíîñà ìà-òåðèàëà, áûëè èçó÷åíû ñâîéñòâà ïîêðûòèé íê -TiN.  çàâèñèìîñòè îò ïîòåíöèàëà ñìå-ùåíèÿ, ïîäàâàåìîãî íà ïîäëîaeêó è äàâëåíèÿ â êàìåðå, âêëþ÷åíèÿ Â× ðàçðÿäà, ïîêàçàíî, ÷òî ñîâîêóïíîñòü ðàçëè÷íûõ ïàðàìåòðîâ ðåãèñòðèðóåìûõ â ïðîöåññå öàðàïàíèÿ, ïîçâîëÿåò ðàçëè÷àòü ïîðîãîâûå çíà÷åíèÿ êðèòè÷åñêîé íàãðóçêè, ïðèâÿçàííûå ê ðàçëè÷íûì òèïàì êî-ãåçèîííîãî è àäãåçèîííîãî ðàçðóøåíèÿ ïîêðûòèé ïðè òðèáîëîãè÷åñêèõ èñïûòàíèÿõ. Áûëè îïðåäåëåíû ðàçìåðû íàíîçåðåí íê -TiN ñòåõèîìåòðèÿ ïîêðûòèé, à òàêaeå ôàçîâûé ýëå-ìåíòíûé ñîñòàâû è ìîðôîëîãèÿ ïîâåðõíîñòè ïîêðûòèé. Abstract. With the raster electron microscope (SEM), XRD defraction, adgesion strength, friction coefficient and wear rate of material properties of the coatings were studied nc -TiN. Depending on the bias potential applied to the substrate and the chamber pressure, the inclusion of high-frequency discharge, it is shown that the combination of different parameters recorded during scratching, allows to distinguish between the critical load thresholds that are linked to different types of cohesive and adhesive fracture coatings in tribological tests. Nanograin sizes were determined nc -TiN coating stoichiometry and phase of elemental composition and surface morphology of the coatings.
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