We have tested experimentally the proposed method of microwave volt-impedance spectroscopy of semiconductors. The method allows to determine the local values of the semiconductor electrophysical parameters. The studies were performed on a homogeneous single-crystal GaAs wafer with a concentric antenna system formed on its surface. The resolution is determined by the diameter of the antenna central disk, which was amounted a = 12, 27, 57 μm. A constant bias voltage of 0 ≤ U ≤ 5 V was applied between the contact pads of the antennas. The complex impedance spectrum Z (f, U) of each antenna was measured using a Cascade Microtech probe station in the frequency range f = 0.1 - 10 GHz. The electrophysical characteristics of the semiconductor were determined from Z(f, U) spectra by the inverse problem solving. We have established the n-type for our semiconductor and determined the electrical potential difference on the metal-semiconductor interface. We have found as well the electron concentration, mobility and conductivity. Measurements of the same parameters by Hall four-probe method (giving the surface averaging) showed good mutual agreement of the results for the homogeneous sample under study.
Microwave voltage-impedance spectroscopy is used to study a semiconductor structure in the form of a doped n-GaAs film grown on a conducting n+-GaAs substrate with a buffer sublayer. A system of concentric barrier contacts is formed on the structure surface. A technique has been developed for measuring complex impedance spectrum Z(f,U) of the sample as a function of DC bias voltage U. Spectra Z(f,U) were measured using a Cascade Microtech probe station in the frequency range 0.01 – 40 GHz with a lateral resolution of 15 – 30 μm at U = 0 – 10 V. The main electrophysical characteristics of a semiconductor film were determined from the spectra: type, concentration and mobility of free charge carriers, electrical conductivity. An excess resistance was found in the range f = 0.1 – 20 GHz. This effect is interpreted as the deep states (traps) recharging for two types of traps – low-frequency l and high-frequency h with characteristic time τl = 10^(-9) s, τh = 4.2∙10^(-11) s. A model description is proposed that explains the characteristic shape of the trap resistance spectrum, its dependence on the contact area and voltage U.
We have proposed and experimentally verified a local method of microwave resonant spectroscopy of semiconductors. The microwave circuit of the spectrometer based on the Cascade Microtech probe station is equipped with a coaxial resonator of special geometry. As result, the measurement accuracy of the previously developed volt-impedance spectroscopy method was greatly increased. A technique for spectrometer calibration and resonant measurements of the complex impedance of the probe-sample system has been developed. We have measured the impedance of test structures with Schottky contacts of 30 - 60 μm in diameter on a single-crystal GaAs wafer at several discrete frequencies in the range of 50 - 250 MHz. The nontrivial resistive properties of the structures are studied, which consist of the excess resistance that is 1–2 orders higher than the spreading resistance for the alternating current in the unperturbed region of the semiconductor. The discovered effect is presumably associated with the a.c. charge modulation on deep levels of the semiconductor. A model calculation of the impedance spectrum has been performed, which demonstrates a good agreement with the experimental spectra.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.