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Assistant
Product
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Pricing
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А. В. Петрова
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Affiliations
Institute of Mechanics and Engineering
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Структурирование Пов ерхности Кремния Плазмой Тлеющего Разряда
Петрова
1
,
Bogoslovtseva
2
,
Старинский
3
et al.
2023
ПМТФ