The influence of the trapping of mobile impurity atoms by immobile defects on superstructures is analyzed. Superstructures are formed as a result of solid-solid phase transitions like the directional crystallization. A capillary wave model was used for the analysis. It was shown that the conditions for the appearance of periodic superstructures are facilitated when the time of the diffusion jump of impurity atoms is much shorter than the characteristic time of their segregation at defects.
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