The mechanical properties of SiC thin films deposited by chemical vapor deposition process on silicon substrate are studied using nanoindentation techniques. The SiC thin films are of three different thicknesses: 1.6μm、4.5μm、9μm. In this study, nanoindentation method is preferred due to its reliability and accuracy on determining mechanical properties from indentation load-displacement data. The mechanical properties of elastic modulus and hardness are characterized. 1.6μm SiC thin film has the following values: E=345.73Gpa, H=33.71Gpa; 4.5μm SiC thin film has the following values: E=170.18Gpa, H=10.33Gpa; 9μm SiC thin film: E=167.96Gpa, H=9.48Gpa
Abstract:Ontologies are building blocks of the Semantic Web and are essential for knowledge representation and data integration. Interactive visualization is an important tool for the understanding of ontologies, especially large ones. In this paper, we present a novel hierarchical ontology visualization method for effectively visualizing an ontology's global landmarks, local structure and individual class' details. We have implemented a visualization system that can handle large ontologies efficiently. Preliminary evaluation indicates that the method and the system can be effectively used to understand large ontologies.
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