This paper reports a new capacitive triaxial micro-accelerometer which consists of four identical dual beam-mass structure. Considering the temperature characteristic, beam consistency and zero bias and other factors of the accelerometer, the arrangement and anchor position, as well as matching capacitor are studied using ANSYS software to complete the design of the overall structure of the accelerometer. The research methed having been uesd is significant for optimizing structure of the micro-accelerometer.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.