In order to achieve the high precision 3D measurement of gear tooth profile, a telecentric optical measurement system with large FOV (field of view), WD (working distance) and measuring range was proposed, the system was applied to the gear tooth profile measurement experiment and obtained a good effect. Firstly, the composition and the principle of the system were introduced. The lights of projection and imaging with an angle of 45° from the normal line of the measured surface can reduce the requirement of DOF (depth of field) of the imaging objective lens. Secondly, in combine with the application background of small modulus gear tooth profile measurement, the magnification, NA (numerical aperture) and other optical parameters were calculated, the optical system was constructed and the system performance parameters are listed. Then, the calibration model of the system was demonstrated and the calibrations of depth pixel resolution and horizontal pixel resolution were completed through experiments. Finally, an involute artifact with a modulus of 2.9992mm and a total tooth profile deviation of 1.1μm was measured. The results show that the deviation of the total tooth profile measured is about 2μm, which is consistent with the calibration curve of the involute artifact.
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