A three-dimensional (3D) chemical characterization of nanomaterials can be obtained using tomography based on high angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) or energy dispersive X-ray spectroscopy (EDS) STEM. These two complementary techniques have both advantages and disadvantages. The Z-contrast images have good image quality but lack robustness in the compositional analysis, while the elemental maps give more element-specific information, but at a low signal-to-noise ratio and a longer exposure time. Our aim is to combine these two types of complementary information in one single tomographic reconstruction process. Therefore, an imaging model is proposed combining both HAADF-STEM and EDS-STEM. Based on this model, the elemental distributions can be reconstructed using both types of information simultaneously during the reconstruction process. The performance of the new technique is evaluated using simulated data and real experimental data. The results demonstrate that combining two imaging modalities leads to tomographic reconstructions with suppressed noise and enhanced contrast.

a b s t r a c tElectron tomography is a powerful technique for the 3D characterization of the morphology of nanostructures. Nevertheless, resolving the chemical composition of complex nanostructures in 3D remains challenging and the number of studies in which electron energy loss spectroscopy (EELS) is combined with tomography is limited. During the last decade, dedicated reconstruction algorithms have been developed for HAADF-STEM tomography using prior knowledge about the investigated sample. Here, we will use the prior knowledge that the experimental spectrum of each reconstructed voxel is a linear combination of a well-known set of references spectra in a so-called direct spectroscopic tomography technique. Based on a simulation experiment, it is shown that this technique provides superior results in comparison to conventional reconstruction methods for spectroscopic data, especially for spectrum images containing a relatively low signal to noise ratio. Next, this technique is used to investigate the spatial distribution of Fe dopants in Fe:Ceria nanoparticles in 3D. It is shown that the presence of the Fe 2 þ dopants is correlated with a reduction of the Ce atoms from Ce 4 þ towards Ce 3 þ . In addition, it is demonstrated that most of the Fe dopants are located near the voids inside the nanoparticle.

Energy-dispersive X-ray spectroscopy (EDS) tomography is an advanced technique to characterize compositional information for nanostructures in three dimensions (3D). However, the application is hindered by the poor image quality caused by the low signal-to-noise ratios and the limited number of tilts, which are fundamentally limited by the insufficient number of X-ray counts. In this paper, we explore how to make accurate EDS reconstructions from such data. We propose to augment EDS tomography by joining with it a more accurate high-angle annular dark-field STEM (HAADF-STEM) tomographic reconstruction, for which usually a larger number of tilt images are feasible. This augmentation is realized through total nuclear variation (TNV) regularization, which encourages the joint EDS and HAADF reconstructions to have not only sparse gradients but also common edges and parallel (or antiparallel) gradients. Our experiments show that reconstruction images are more accurate compared to the non-regularized and the total variation regularized reconstructions, even when the number of tilts is small or the X-ray counts are low.

The 3D spatial resolution, the material contrast and the evolution of the noise are analyzed in the reconstructed volume of a combined scanning transmission electron microscopy (HAADF-STEM) and energy dispersive x-ray spectroscopy (EDS) tomography experiment. Standard simultaneous iterative reconstruction technique and HAADF-EDS bimodal tomographic reconstruction are considered for the +/−90°tomography series of a pillar shaped sample embedding a full nanowire device. With a high number of iterations, a spatial resolution for both HAADF and EDS down to 5 nanometer can be reached for this volume. Best material's contrast and minimum noise are obtained for medium number of iterations. Improvement of the signal-tonoise and contrast can be obtained by filtering the EDS data while the spatial resolution is not impacted. A fast and reliable preparation methodology for rectangularly shaped pillar samples for tomography analysis is discussed.

Tomographic reconstruction algorithms offer a means by which a tilt-series of transmission images can be combined to yield a three dimensional model of the specimen. Conventional reconstruction algorithms assume that the measured signal is a linear projection of some property, typically the density, of the material. Here we report the use of multislice simulations to investigate the extent to which this assumption is met in HAADF-STEM imaging. The use of simulations allows for a systematic survey of a range of materials and microscope parameters to inform optimal experimental design. Using this approach it is demonstrated that the imaging of amorphous materials is in good agreement with the projection assumption in most cases. Images of crystalline specimens taken along zone-axes are found to be poorly suited for conventional linear reconstruction algorithms due to channelling effects which produce enhanced intensities compared with off-axis images, and poor compliance with the projection requirement. Off-axis images are found to be suitable for reconstruction, though they do not strictly meet the linearity requirement in most cases. It is demonstrated that microscope parameters can be selected to yield improved compliance with the projection requirement.

Low-energy electron diffraction, Auger electron spectroscopy and photoemission yield spectroscopy measurements have been performed on GaAs samples cleaved in ultra-high vacuum and subject to in situ isochronous anneals up to 850 degrees C. The properties of the cleaved (110) surface remain unchanged up to about 350 degrees C. Around this temperature, a dissociation occurs inducing a local reconstruction of the surface; at the same time, new states appear which may be attributed to Ga vacancies. Then, around 580 degrees C, the well known dissociation of GaAs sets in with formation of As2, and the Ga-Ga bonds which then form, determine the electronic properties of the sample. Evaporation of arsenic would become dominant around 650 degrees C. Beyond about 780 degrees C, the excess Ga coalesces into Ga-metal droplets and the GaAs substrate undergoes faceting.

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Energy-dispersive X-ray spectroscopic (EDS) tomography is a powerful three-dimensional (3D) imaging technique for characterizing the chemical composition and structure of nanomaterials. However, the accuracy and resolution are typically hampered by the limited number of tilt images that can be measured and the low signal-to-noise ratios (SNRs) of the energy-resolved tilt images. Various sophisticated reconstruction algorithms have been proposed for specific types of samples and imaging conditions, yet deciding on which algorithm to use for each new case remains a complex problem. In this paper, we propose to tailor the reconstruction algorithm for EDS tomography in three aspects: (1) model the reconstruction problem based on an accurate assumption of the data statistics; (2) regularize the reconstruction to incorporate prior knowledge; (3) apply bimodal tomography to augment the EDS data with a high-SNR modality. Methods for the three aspects can be combined in one reconstruction procedure as three modules. Therefore, a reconstruction algorithm can be constructed as a 'recipe'. We also provide guidelines for preparing the recipe based on conditions and assumptions for the data. We investigate the effects of different recipes on both simulated data and real experimental data. The results show that the preferred recipe depends on both acquisition conditions and sample properties, and that the image quality can be enhanced using a properly tailored recipe.