In the macro/micro dual-drive rotary system, the micro-drive system compensates for the position error of the macro-drive system. To realize the sub-arc-second (i.e., level of 1″–0.1″) positioning of the macro/micro dual-drive rotary system, it is necessary to study the positioning performance of the sub-arc-second micro-drive rotary system. In this paper, we designed a sub-arc-second micro-drive rotary system consisting of a PZT (piezoelectric actuator) and a micro rotary mechanism, and used simulation and experimental methods to study the positioning performance of the system. First, the micro-drive rotary system was developed to provide ultra-precise rotary motion. In this system, the PZT has ultrahigh resolution at a level of 0.1 nanometers in linear motion; a micro rotating mechanism was designed according to the composite motion principle of the flexible hinge, which could transform the linear motion of piezoelectric ceramics into rotating motion accurately. Second, the drive performance was analyzed based on the drive performance experiment. Third, kinematics, simulation, and experiments were carried out to analyze the transformation performance of the system. Finally, the positioning performance equation of the system was established based on the two performance equations, and the maximum rotary displacements and positioning error of the system were calculated. The study results showed that the system can provide precision motion at the sub-arc-second and good linearity of motion. This study has a certain reference value in ultra-precision positioning and micromachining for research on rotary motion systems at the sub-arc-second level.
In order to obtain motion with large travel and high precision, the micro-drive system is used to compensate for the motion error of the macro-drive system in the macro/micro dual-drive system. The research on the micro-drive rotary system lags behind the micro-drive linear system, so it is of great significance to study the designing and error compensation performance of a precision micro-drive rotary system. In this paper, a precision micro-drive rotary system is designed, the error compensation scheme of the system is proposed, and the system feasibility in design and error compensation is tested by FEM simulation analysis and performance experiments. Firstly, a precision micro-drive rotary system is designed to provide high-precision rotary motion, which consists of a micro rotary mechanism and PZT. In the system, the micro rotary mechanism is developed based on the compound motion principle of flexure hinge, which can accurately transform an input of linear motion into an output of rotary motion according to a certain relationship. Secondly, for finishing the error compensation scheme of the system, the maximum compensation modifier θ max ′ is proposed based on the analysis of error compensation equations of point-to-point motion and continuous motion. Finally, in order to facilitate the use of engineering, the driven voltage equation of error compensation is derived by the error compensation performance experiment. The simulation and experiment results indicate that both the design and error-compensation-range of the system satisfy the needs of practical application.
At present, there are shortcomings in the research of micro-drive amplification mechanism, such as insufficient precision and additional force. In this paper, a kind of micro-drive amplification mechanism is designed and its positioning accuracy is simulated. Firstly, a kind of micro-drive amplification mechanism is designed, which can accurately transform the input displacement of piezoelectric ceramic actuator (PZT) into the output displacement of a certain number of amplification. the theoretical motion magnification ratio of the mechanism is 3:1. Secondly, the kinematics and simulation of the mechanism were studied, and the conversion performance of the mechanism was analyzed. The results showed that the micro-drive amplification mechanism has the advantage of high positioning accuracy (maximum positioning error is 4.67%). Finally, through strength analysis and modal analysis, the performance of micro-drive amplification mechanism is studied. This study has some reference value for the research and application of precision micro-drive amplification mechanism.
The guide stiffness performance directly affects the motion of the micromechanism in accuracy and security. Therefore, it is crucial to analyze the guide stiffness precisely. In this paper, a high-precision guide stiffness analysis method for the micromechanism by the boundary element method (BEM) is proposed. The validity and accuracy of the analysis method are tested by a guide stiffness experiment. In order to ensure the accuracy and safety during the micromechanism motion, a guiding unit of the micromechanism was designed based on the guiding principle. The guiding unit can provide parasitic motion and additional force in the motion of the micromechanism. Then, the stiffness equations of the beam element are derived by the boundary element method. The stiffness equation of straight circular flexure hinge is analyzed by rigid discretization and rigid combination, and the guide stiffness of the mechanism is investigated by rigid combination. Finally, according to the actual situation, the stiffness matrix of the guide rail (Kb) was proposed, and the analytical value of the guide stiffness was calculated to be 22.2 N/μm. The guide stiffness performance experiment was completed, and the experimental value is 22.3 N/μm. Therefore, the error between the analysis method and the experimental results is 0.45%. This study provides a new method for the stiffness analysis of high-precision micromechanisms and presents a reference for the design and stiffness analysis of complex structures. This method is helpful for stiffness analysis of the microrotary mechanism with high accuracy.
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