In this paper, the corrugated diaphragm technique is studied for applications to micromachined highly sensitive devices. Both static and dynamic behaviours of square corrugated diaphragms with various structural parameters and material properties are analysed using the finite-element method (FEM). The simulations show that very high performance (e.g., high mechanical sensitivity, small static deflection and high resonance frequency) of the diaphragms can be achieved using this technique. For the proposed corrugated diaphragms with anisotropically etched corrugations, much better reproducibility of the device performance can be expected. Different types of square diaphragm with rectangular corrugations have been fabricated using the silicon anisotropic etching technique and the optimized processes are presented. The measurements have shown reasonable agreement with the analyses. A capacitive pressure sensor is realized by the corrugation technique, with which sensitivity as high as 0.33% has been achieved.
Modal parameter model acts as an analytical model of tire, because it can represent the entire tire characteristics, when applied to the tire modelling. However, without considering the effect of transfer characteristics of adjacent tread spring elements, the accuracy of modal parameter model may be limited in previous studies. Based on contact mechanics and the modal parameter model, a novel tread model is proposed considering tread transfer characteristics, and then a modified model using the modal parameters was obtained using the novel tread model. The effects of tire external characteristics were analyzed by modifying the modal parameter static vertical model. Finally, the experimental and calculated data were compared, the proposed tread model improved the accuracy of calculation. The results show that the tread transfer characteristics significantly affect contact length, i.e., by improving the predictive accuracy by 50 %, and the effect on improving the squat of tire can be ignored. The developed model may help to optimize tire modelling.
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