Piezoelectric actuators are widely used in micro/nanoscale robotic manipulators. Due to its hysteresis and dynamic-related nonlinearity, accurate displacement tracking control of piezoelectric actuator is challenging. Besides, in some low-cost practical systems with low sampling rate, transmission delay causes mismatches between feedback and real displacement, further increasing the challenge in tracking control. In this article, a neural network-based model predictive controller (MPC) is proposed for precise tracking control of piezoelectric actuator’s displacement in situation where feedback is slow and delayed. The prediction model is based on a nonlinear-autoregressive-moving-average-with-exogenous-inputs framework, which outputs entire prediction horizon of future displacement in a single time, and is fulfilled by a multilayer feedforward neural network. An extended Kalman filter-based estimation for displacement is introduced to relieve the influence of feedback delays so as to improve dynamic performance of the controller. Another neural network is trained to provide initial values for MPC to reduce computation costs and improve performance in dynamic tracking. In a series of tracking experiments, the effectiveness of proposed controller is verified.
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