In this study, Eu 3þ doped Y 2 O 3 (Y 2 O 3 : Eu 3þ ) phosphor target was deposited on quartz fibre substrates by electron beam evaporation technology, and then the deposited fibres were annealed at different temperatures from 600 to 10008C. Particle shape was changed, and particle size of Y 2 O 3 : Eu 3þ was increased with the rise in annealing temperature. Crystallisation and luminescent intensity of the deposited films on quartz fibres were significantly improved by annealing treatment. The most effective crystallisation and the maximum luminescent efficiency of the thin films were obtained when the deposited fibres were treated at 10008C for 1 h. The luminescent property results indicated that the particle shape, particle size and crystallisation were the important factors affecting luminescent intensity of the deposited fibres.
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