In this work, high transparent TiO2 nano-crystallinethin films have been prepared by a simple sol–gel spin coating technique.The effect of the number of layers on physical properties of TiO2 thin films were studied by X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), UV-Vis spectrophotometer, and four probes measurement.The XRD analysis confirms that TiO2 has anatase phase structure with preferred orientation of (101) direction, while the crystallite size values varied with the number of layers in the range of 16-19 nm. The films exhibit high optical transparency (>70%), reaching a maximum of 85% in the visible region with the red-shifted absorption edge, suggesting the films optical gap energy decreases with an increasing number of layers from 3.67 to 3.52 eV. However, the FTIR reflectance spectra show the existence of functional groups and chemical bonding.The films' electrical properties measurement indicated substantial enhancement in the resistivity with an increasing in the number of layers from3.3×105 to 2.15×106 Ω.cm. This study indicates that TiO2 films may be a potential candidate for technological applications as solar cells, photocatalysts, and gas sensors due to their desired structural, optical, and electrical properties.
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